JPS63124589A - Cas laser apparatus - Google Patents

Abstract

PURPOSE:To obtain a stable gas stream readily even in a high pressure loss region, by providing a main flow path through a discharge part, a heat exchanger and a blower as a gas flow path, and providing a bypass, through which the gas is made to flow to the blower from a part other than the discharge part. CONSTITUTION:Small holes 10 are provided in a duct 9, which is provided in a main flow path. Thus a bypass, which is circulated through the small holes 10, a heat exchanger 5 and a blower 4 and without through a discharge part 14, is provided. The flow rate of gas, which is made to flow into the blower 4, can be increased by regulating the number of the small holes 10. Therefore, this apparatus can be used stably even in a region, in which pressure loss is larger than the surge limit of the blower 4. Thus the gas stream system is simplified, and the compact gas laser apparatus can be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a gas laser device and an improvement in its ventilation system.

[Conventional technology]

Fig. 4 (a) (b) u each, for example, JP-A-55-15
4190 is a longitudinal cross-sectional configuration diagram and a cross-sectional configuration diagram showing a conventional AO2 laser device shown in Japanese Patent Publication No. 4190.

0υa2 is the electrode, α3 is the power supply connected to this electrode, α
4 is a discharge generated between the electrodes antta, (2) is a take-out mirror, (3) is a reflector, (4) is a blower, (5) is a heat exchanger, (61 is a housing).

(7) is a laser beam, and (8) is an arrow indicating the gas flow direction.

Next, I will explain the operation.
A laser gas consisting of 002, Hew N2, etc. is sealed at a pressure of 0.002 mm, Hew N2, etc. iI! 9002 molecules are excited by the discharge α4 generated between the poles αυG2, forming a binary resonator (mirror+2), and a laser beam (taken outside as a sword) stabilizes the discharge and increases the gas temperature in the discharge part. In order to suppress the electrical discharge, the blower (4) is used to
Laser gas circulates in the direction of arrow 181 at a speed of m/s.

Further, a heat exchanger (5) is provided in the gas flow path in order to cool the gas whose temperature has risen in the discharge section.

FIG. 5 is a curve diagram showing the performance of the blower, where the horizontal axis is the gas flow rate Q and the vertical axis is the static pressure ΔP of the blower.

The solid line 111 indicates the operating characteristics of the blower, the dashed line 111 indicates the surge limit, and the solid line indicates the operating characteristics of the laser gas fluid system.Usually, the blower has a surge limit. This is an area that cannot be used because it may cause the blades to stall.

Broken line? Can only be used on the right side. Conventionally, in order to use this region on the right, the width of the gas duct is widened, the pressure loss ΔPf of the gas fluid is reduced, and the operating characteristics shown by the dots in Figure 5 are obtained. Since conventional gas laser devices are configured as described above, there is a problem in that the width of the gas duct must be widened, which results in a large housing. However, the design had to be designed with a margin of safety in consideration of the surge limit of the blower, and it was often necessary to select a blower that was one rank higher.

This invention was made to solve the above-mentioned problems.
The purpose of this invention is to obtain a compact gas laser device in which the blower operates stably, thus simplifying the gas fluid system.

[Means for solving problems]

The gas laser device according to the present invention has a main flow path that passes through a discharge section, a heat exchanger, and a blower as a gas flow path.

A bypass flow path is provided to allow gas to flow to the blower from areas other than the discharge section.

[Effect]

In the gas laser device of the present invention, the laser gas is sent to the blower through the bypass passage in addition to the main passage, so the gas flow rate to the blower is increased.

It can be used stably even in areas where the pressure loss is large beyond the surge limit of the blower. [Example] Hereinafter, an example of the present invention will be described with reference to the drawings.

FIGS. 1(8) and 1(b) are a cross-sectional configuration diagram and a longitudinal sectional configuration diagram respectively showing a gas laser device according to an embodiment of the present invention, and in FIG. (4) was provided in the main flow path passing through. The duct for gas intake to the blower, αIH, is a plurality of small holes drilled into this duct (9).

The operation curve of the blower shown in Fig. 2 will be explained with reference to the case where the duct (9) has a small hole (tl) and the case where it does not. In Fig. 2, the dashed line F' is the curve indicating the surge limit. As mentioned above, the blower must be used on the right side of this line. By the way, in the curves MGe H, ENG, and J, if there is no small hole α1 in the duct (9), the small hole α1 , a case where the number of small holes α1 is insufficient, a case where there is an appropriate amount of small holes H, and a case where there are too many small holes α1 are shown.

The operating points of each of the above are given by A, B, O, and D. However, when it is on the left side of the surge limit (
Point AtB) fl cannot be used, so 9 points and 0. Only case D is allowed.

The above results are explained in detail in Fig. 3, the small hole t11.
In the case where there is no gas flow rate of Ql at ΔP1, a small hole (1G is provided in the system in which the gas flow rate of Ql flows, that is, the main channel (8. Considering the bypass flow path (82) that circulates through the hole Ql to the heat exchanger (5) and the blower (4), by adjusting the number of small holes !10, the general bypass flow path (82) is set to ΔP1. Suppose now that Q2 t Q, 3 e Q, 4 no gas flow 1 (fi) is obtained.

Point 0 from the point of view of the blower +41. Since it is on the right side of the Di surge limit, a stable gas flow can be obtained.

At this time, the gas flow fik flowing through the main channels (8) is X.

It turns out that point a where the maximum gas flows is effective in the case of point a where the maximum gas flows.Adjust the flow rate of the bypass flow path so that the operating characteristics are above the surge limit or slightly to the right. It can be seen that it will operate stably and allow the maximum flow rate to flow through the main flow path if Other piping may be used for this purpose.

The gas flow rate in the bypass flow path was adjusted by the number of small holes, but
A similar effect can be obtained by using a flow rate v8 regulating device such as a valve.

In addition to the configuration of the gas laser device shown in FIG.
In the structure shown in the figure, a bypass flow path may be provided. [Effects of the Invention] As described above, according to the present invention, the gas flow path includes a discharge section, a heat exchanger, and a blower. with the main flow path passing through.

By providing a bypass flow path that allows gas to flow to the blower from areas other than the first section, a stable gas flow can be easily obtained even in areas with high pressure loss that could not be used in the past, and the gas flow system can be simplified to create a compact design. This has the effect of providing a gas laser device.

[Brief explanation of the drawing]

FIG. 1(a)(1)) is a cross-sectional configuration diagram and a vertical cross-sectional configuration diagram showing a gas laser device according to an embodiment of the present invention, respectively;
FIG. 2 is a characteristic diagram showing the operating characteristics of a blower according to an embodiment of the present invention, FIG. 3 is an explanatory diagram illustrating a gas flow path according to an embodiment of the present invention, and FIG. ) are a vertical cross-sectional view and a cross-sectional configuration diagram showing a conventional gas laser device, respectively.
Also, Fig. 5 is a characteristic diagram showing the operating characteristics of a conventional blower. +ol, a2i'? The pole, (141 [release 111!,
+41t-j blower, 151?1 heat exchanger, (7) is laser beam, (8) is gas flow direction, (9) is duct),
(II is the hole, (8) is the main flow channel e (82) is the bypass flow channel. In Figure 9, the same reference numerals indicate the same or equivalent parts.

Claims (4)

[Claims] (1) a discharge section, a blower that circulates the laser gas in the discharge section, a heat exchanger that cools the laser gas, the discharge section,
A gas laser device comprising a main flow path through which the laser gas flows via a heat exchanger and a blower, and a bypass flow path that increases the flow rate of gas flowing to the blower through a region other than the discharge section. (2) The gas laser device according to claim 1, wherein the gas flow rate flowing through the bypass channel is adjustable. (3) The gas laser device according to claim 1 or 2, wherein a plurality of holes are formed in a duct portion for sucking gas into the blower provided in the main flow path to constitute a bypass flow path. (4) The gas laser device according to claim 3, wherein the number of holes is adjusted to adjust the flow rate of gas flowing through the bypass channel.