JPS63124436U - - Google Patents

Info

Publication number
JPS63124436U
JPS63124436U JP1586187U JP1586187U JPS63124436U JP S63124436 U JPS63124436 U JP S63124436U JP 1586187 U JP1586187 U JP 1586187U JP 1586187 U JP1586187 U JP 1586187U JP S63124436 U JPS63124436 U JP S63124436U
Authority
JP
Japan
Prior art keywords
pressure
back pressure
air supply
sliding surface
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1586187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0618751Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1586187U priority Critical patent/JPH0618751Y2/ja
Publication of JPS63124436U publication Critical patent/JPS63124436U/ja
Application granted granted Critical
Publication of JPH0618751Y2 publication Critical patent/JPH0618751Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP1586187U 1987-02-05 1987-02-05 機械の摺動面荷重補償装置 Expired - Lifetime JPH0618751Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1586187U JPH0618751Y2 (ja) 1987-02-05 1987-02-05 機械の摺動面荷重補償装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1586187U JPH0618751Y2 (ja) 1987-02-05 1987-02-05 機械の摺動面荷重補償装置

Publications (2)

Publication Number Publication Date
JPS63124436U true JPS63124436U (show.php) 1988-08-12
JPH0618751Y2 JPH0618751Y2 (ja) 1994-05-18

Family

ID=30807184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1586187U Expired - Lifetime JPH0618751Y2 (ja) 1987-02-05 1987-02-05 機械の摺動面荷重補償装置

Country Status (1)

Country Link
JP (1) JPH0618751Y2 (show.php)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013142433A (ja) * 2012-01-10 2013-07-22 Mitsutoyo Corp すべり案内装置
JP2017060999A (ja) * 2015-09-24 2017-03-30 三井精機工業株式会社 工作機械における移動体支持装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104379974B (zh) 2012-10-04 2017-05-10 伊格尔工业股份有限公司 机械密封件
JP6132525B2 (ja) 2012-11-30 2017-05-24 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013142433A (ja) * 2012-01-10 2013-07-22 Mitsutoyo Corp すべり案内装置
JP2017060999A (ja) * 2015-09-24 2017-03-30 三井精機工業株式会社 工作機械における移動体支持装置

Also Published As

Publication number Publication date
JPH0618751Y2 (ja) 1994-05-18

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