JPS63123673U - - Google Patents

Info

Publication number

JPS63123673U

JPS63123673U JP1219887U JP1219887U JPS63123673U JP S63123673 U JPS63123673 U JP S63123673U JP 1219887 U JP1219887 U JP 1219887U JP 1219887 U JP1219887 U JP 1219887U JP S63123673 U JPS63123673 U JP S63123673U

Authority

JP

Japan

Prior art keywords

gallium arsenide

quartz

single crystal

heat

resistant member

Prior art date

1987-01-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

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• 239000010453 quartz Substances 0.000 claims description 7
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
• JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 6
• 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 6
• 239000013078 crystal Substances 0.000 claims description 5
• 238000004519 manufacturing process Methods 0.000 claims description 4
• 239000003708 ampul Substances 0.000 claims description 3
• 229910052582 BN Inorganic materials 0.000 claims 1
• PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
• GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
• 229910052581 Si3N4 Inorganic materials 0.000 claims 1
• 229910052785 arsenic Inorganic materials 0.000 claims 1
• RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 1
• 229910052799 carbon Inorganic materials 0.000 claims 1
• 229910052733 gallium Inorganic materials 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
• 229910010271 silicon carbide Inorganic materials 0.000 claims 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
• 230000002194 synthesizing effect Effects 0.000 claims 1