JPS63123096U - - Google Patents

Info

Publication number
JPS63123096U
JPS63123096U JP1538787U JP1538787U JPS63123096U JP S63123096 U JPS63123096 U JP S63123096U JP 1538787 U JP1538787 U JP 1538787U JP 1538787 U JP1538787 U JP 1538787U JP S63123096 U JPS63123096 U JP S63123096U
Authority
JP
Japan
Prior art keywords
container
gas
plasma
electrodes
frequency induction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1538787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1538787U priority Critical patent/JPS63123096U/ja
Publication of JPS63123096U publication Critical patent/JPS63123096U/ja
Pending legal-status Critical Current

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  • Plasma Technology (AREA)
JP1538787U 1987-02-04 1987-02-04 Pending JPS63123096U (US08063081-20111122-C00115.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1538787U JPS63123096U (US08063081-20111122-C00115.png) 1987-02-04 1987-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1538787U JPS63123096U (US08063081-20111122-C00115.png) 1987-02-04 1987-02-04

Publications (1)

Publication Number Publication Date
JPS63123096U true JPS63123096U (US08063081-20111122-C00115.png) 1988-08-10

Family

ID=30806273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1538787U Pending JPS63123096U (US08063081-20111122-C00115.png) 1987-02-04 1987-02-04

Country Status (1)

Country Link
JP (1) JPS63123096U (US08063081-20111122-C00115.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009004157A (ja) * 2007-06-20 2009-01-08 Univ Nagoya プラズマ発生装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5532317A (en) * 1978-08-28 1980-03-07 Asahi Chemical Ind High frequency magnetic field coupling arc plasma reactor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5532317A (en) * 1978-08-28 1980-03-07 Asahi Chemical Ind High frequency magnetic field coupling arc plasma reactor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009004157A (ja) * 2007-06-20 2009-01-08 Univ Nagoya プラズマ発生装置

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