JPS63122782U - - Google Patents
Info
- Publication number
- JPS63122782U JPS63122782U JP1987010703U JP1070387U JPS63122782U JP S63122782 U JPS63122782 U JP S63122782U JP 1987010703 U JP1987010703 U JP 1987010703U JP 1070387 U JP1070387 U JP 1070387U JP S63122782 U JPS63122782 U JP S63122782U
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- optical head
- processing table
- value
- outputs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 3
- 230000002159 abnormal effect Effects 0.000 claims 2
- 230000003321 amplification Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Description
第１図は本考案の実施例を示す構成図である。
図面中、１は光学ヘツド、２は加工テーブル、
３は被加工物、４は振動検出器、５は増幅部、６
は基準値発生部、７は比較判定部、８はサーボア
ンプ、９は位置指令部、１０は被加工物支持部、
１１はサーボモータ、２０は振動判定回路、３０
はサーボ制御部である。
FIG. 1 is a block diagram showing an embodiment of the present invention. In the drawing, 1 is an optical head, 2 is a processing table,
3 is a workpiece, 4 is a vibration detector, 5 is an amplification section, 6
1 is a reference value generation section, 7 is a comparison/judgment section, 8 is a servo amplifier, 9 is a position command section, 10 is a workpiece support section,
11 is a servo motor, 20 is a vibration determination circuit, 30
is the servo control section.
Claims (1)
ーブル上にのせた被加工物に向けレーザ光を照射
する光学ヘツドと、を有するレーザ加工機におい
て、 前記光学ヘツドに取付けられてその振動値を示
す検出信号を出力する振動検出器と、予め設定し
た基準信号と前記検出信号との値を比較しその差
が一定値を越えると異常信号を出力する振動判定
回路と、異常信号を受けると加工テーブルの移動
を停止させるサーボ制御部と、を備えたことを特
徴とする光学ヘツド干渉検出装置。[Claims for Utility Model Registration] A laser processing machine having a processing table that moves within a plane and an optical head that irradiates a laser beam to a workpiece placed on the processing table, which is attached to the optical head. a vibration detector that outputs a detection signal indicating the vibration value of the detected vibration; a vibration determination circuit that compares the value of the detection signal with a preset reference signal and outputs an abnormal signal when the difference exceeds a certain value; An optical head interference detection device comprising: a servo control section that stops movement of a processing table upon receiving an abnormal signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987010703U JPS63122782U (en) | 1987-01-29 | 1987-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987010703U JPS63122782U (en) | 1987-01-29 | 1987-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63122782U true JPS63122782U (en) | 1988-08-10 |
Family
ID=30797245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987010703U Pending JPS63122782U (en) | 1987-01-29 | 1987-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63122782U (en) |
-
1987
- 1987-01-29 JP JP1987010703U patent/JPS63122782U/ja active Pending
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