JPS63122605U - - Google Patents

Info

Publication number
JPS63122605U
JPS63122605U JP1271387U JP1271387U JPS63122605U JP S63122605 U JPS63122605 U JP S63122605U JP 1271387 U JP1271387 U JP 1271387U JP 1271387 U JP1271387 U JP 1271387U JP S63122605 U JPS63122605 U JP S63122605U
Authority
JP
Japan
Prior art keywords
vacuum chamber
light
vacuum
window
solenoid valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1271387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1271387U priority Critical patent/JPS63122605U/ja
Publication of JPS63122605U publication Critical patent/JPS63122605U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
JP1271387U 1987-01-30 1987-01-30 Pending JPS63122605U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1271387U JPS63122605U (enrdf_load_stackoverflow) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1271387U JPS63122605U (enrdf_load_stackoverflow) 1987-01-30 1987-01-30

Publications (1)

Publication Number Publication Date
JPS63122605U true JPS63122605U (enrdf_load_stackoverflow) 1988-08-09

Family

ID=30801100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1271387U Pending JPS63122605U (enrdf_load_stackoverflow) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPS63122605U (enrdf_load_stackoverflow)

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