JPS63121430U - - Google Patents
Info
- Publication number
- JPS63121430U JPS63121430U JP1294187U JP1294187U JPS63121430U JP S63121430 U JPS63121430 U JP S63121430U JP 1294187 U JP1294187 U JP 1294187U JP 1294187 U JP1294187 U JP 1294187U JP S63121430 U JPS63121430 U JP S63121430U
- Authority
- JP
- Japan
- Prior art keywords
- soaking tube
- vertical furnace
- sealed
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002791 soaking Methods 0.000 claims description 8
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294187U JPS63121430U (de) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294187U JPS63121430U (de) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121430U true JPS63121430U (de) | 1988-08-05 |
Family
ID=30801540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1294187U Pending JPS63121430U (de) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121430U (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61114522A (ja) * | 1984-11-09 | 1986-06-02 | Hitachi Ltd | 半導体ウエハ加熱装置 |
| JPS62272525A (ja) * | 1986-05-21 | 1987-11-26 | Hitachi Ltd | 熱処理装置 |
-
1987
- 1987-01-30 JP JP1294187U patent/JPS63121430U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61114522A (ja) * | 1984-11-09 | 1986-06-02 | Hitachi Ltd | 半導体ウエハ加熱装置 |
| JPS62272525A (ja) * | 1986-05-21 | 1987-11-26 | Hitachi Ltd | 熱処理装置 |