JPS63121430U - - Google Patents
Info
- Publication number
- JPS63121430U JPS63121430U JP1294187U JP1294187U JPS63121430U JP S63121430 U JPS63121430 U JP S63121430U JP 1294187 U JP1294187 U JP 1294187U JP 1294187 U JP1294187 U JP 1294187U JP S63121430 U JPS63121430 U JP S63121430U
- Authority
- JP
- Japan
- Prior art keywords
- soaking tube
- vertical furnace
- sealed
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002791 soaking Methods 0.000 claims description 8
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Description
第１図は本考案均熱管の一実施例を用いた下部
挿入式縦型炉の簡略断面図、第２図は本考案均熱
管の一実施例を示す斜視図、第３図は従来均熱管
の一例を用いた下部挿入式縦型炉の一部の簡略断
面図、第４図は従来均熱管の一例を示す斜視図で
ある。
１……均熱管、１ａ……均熱管１の上面。
Fig. 1 is a simplified sectional view of a bottom-inserted vertical furnace using an embodiment of the soaking tube of the present invention, Fig. 2 is a perspective view showing an embodiment of the soaking tube of the invention, and Fig. 3 is a conventional soaking tube. FIG. 4 is a simplified cross-sectional view of a part of a bottom insertion type vertical furnace using an example, and FIG. 4 is a perspective view showing an example of a conventional soaking tube. 1... The soaking tube, 1a... The upper surface of the soaking tube 1.
Claims (1)
て、均熱管の上部を密閉してなる下部挿入式縦型
炉用均熱管。 A soaking tube for a bottom-inserted vertical furnace, in which the top of the soaking tube is sealed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294187U JPS63121430U (en) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294187U JPS63121430U (en) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121430U true JPS63121430U (en) | 1988-08-05 |
Family
ID=30801540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1294187U Pending JPS63121430U (en) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121430U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61114522A (en) * | 1984-11-09 | 1986-06-02 | Hitachi Ltd | Heater for semiconductor wafer |
| JPS62272525A (en) * | 1986-05-21 | 1987-11-26 | Hitachi Ltd | Heat treating apparatus |
-
1987
- 1987-01-30 JP JP1294187U patent/JPS63121430U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61114522A (en) * | 1984-11-09 | 1986-06-02 | Hitachi Ltd | Heater for semiconductor wafer |
| JPS62272525A (en) * | 1986-05-21 | 1987-11-26 | Hitachi Ltd | Heat treating apparatus |