JPS63121425U - - Google Patents
Info
- Publication number
- JPS63121425U JPS63121425U JP1258187U JP1258187U JPS63121425U JP S63121425 U JPS63121425 U JP S63121425U JP 1258187 U JP1258187 U JP 1258187U JP 1258187 U JP1258187 U JP 1258187U JP S63121425 U JPS63121425 U JP S63121425U
- Authority
- JP
- Japan
- Prior art keywords
- impurities
- ion implantation
- attaching
- semiconductor wafer
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1258187U JPS63121425U (enExample) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1258187U JPS63121425U (enExample) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121425U true JPS63121425U (enExample) | 1988-08-05 |
Family
ID=30800845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1258187U Pending JPS63121425U (enExample) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121425U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848414A (ja) * | 1981-09-17 | 1983-03-22 | Toshiba Corp | 半導体基板の印字方法 |
| JPS6122470A (ja) * | 1984-07-10 | 1986-01-31 | Matsushita Electric Ind Co Ltd | フロントロ−デイングプレ−ヤ |
-
1987
- 1987-01-30 JP JP1258187U patent/JPS63121425U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848414A (ja) * | 1981-09-17 | 1983-03-22 | Toshiba Corp | 半導体基板の印字方法 |
| JPS6122470A (ja) * | 1984-07-10 | 1986-01-31 | Matsushita Electric Ind Co Ltd | フロントロ−デイングプレ−ヤ |