JPS63120764U - - Google Patents

Info

Publication number
JPS63120764U
JPS63120764U JP1987011678U JP1167887U JPS63120764U JP S63120764 U JPS63120764 U JP S63120764U JP 1987011678 U JP1987011678 U JP 1987011678U JP 1167887 U JP1167887 U JP 1167887U JP S63120764 U JPS63120764 U JP S63120764U
Authority
JP
Japan
Prior art keywords
fixed
polishing device
surface plate
abrasive object
fixed abrasive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987011678U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987011678U priority Critical patent/JPS63120764U/ja
Publication of JPS63120764U publication Critical patent/JPS63120764U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP1987011678U 1987-01-29 1987-01-29 Pending JPS63120764U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987011678U JPS63120764U (enrdf_load_stackoverflow) 1987-01-29 1987-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987011678U JPS63120764U (enrdf_load_stackoverflow) 1987-01-29 1987-01-29

Publications (1)

Publication Number Publication Date
JPS63120764U true JPS63120764U (enrdf_load_stackoverflow) 1988-08-04

Family

ID=30799109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987011678U Pending JPS63120764U (enrdf_load_stackoverflow) 1987-01-29 1987-01-29

Country Status (1)

Country Link
JP (1) JPS63120764U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364463A (en) * 1976-11-22 1978-06-08 Nippon Telegr & Teleph Corp <Ntt> Fixing tray of semiconductor wafers

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364463A (en) * 1976-11-22 1978-06-08 Nippon Telegr & Teleph Corp <Ntt> Fixing tray of semiconductor wafers

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