JPS63120203A - Marked line display device of visual inspection apparatus - Google Patents

Abstract

PURPOSE:To display a marked line magnified on a monitor picture, by detecting the image pickup magnification of an image pickup means by an image pickup magnification detection means and altering the dimension of the image of the marked line projected on the basis of the magnification signal obtained by an image synthesizing means so as to allow the same to correspond to the dimension of the image of an object to be inspected. CONSTITUTION:The first table 3 for locating and placing a master substrate and the second table 4 for mounting a substrate to be inspected intended to be visually confirmed are provided to the surface of an electrical equipment-housing main body 2 constituting a visual confirmation apparatus 1 side by side. Further, television cameras 7, 8 synchronously driven are provided so as to straddle both tables 3, 4 and the images of both tables are projected on the monitor television receivers 10, 11 of a monitor image part 6. In this constitution, a zoom lens 15 of which the zooming ratio can be changed by a reversibly rotatable motor 16 and an optical system 17 of which the optical axis is deflected by 90 deg. are provided to the cameras 7, 8 and the image signals obtained from the cameras 7, 8 and the position pulse signal L obtained from a rotary encoder 20 are synthesized by a continuous scale synthesizing circuit 22 and the display corresponding to magnification is performed on a display device to obtain a desired marked line 24.

Description

[Detailed Description of the Invention] (Industrial Application Field) This invention captures an image of a pattern such as a printed wiring board that requires high precision as an object to be inspected using a television camera, and displays the image on a monitor screen. It relates to equipment for visual confirmation, especially equipment that combines and displays the image of the object to be inspected and the marked line image on a monitor screen, and is used, for example, in printed circuit board defect inspection equipment and length measurement equipment. Ru.

(Prior art) When measuring graphic dimensions and coordinate positions of an object to be inspected such as a printed wiring board, or visually confirming defects in a printed wiring board, conventional methods
As shown in Japanese Patent Publication No. 18257 and Japanese Patent Publication No. 60-48683, a microscope was used. However,
Those using a microscope have a problem in that errors are likely to occur due to operator parallax.

Therefore, an imaging means such as a television camera is provided in place of the microscope, and the image taken by the imaging means at the desired position of the object to be inspected is displayed on the monitor TV together with the reference line, and the part to be inspected is visually recognized through the monitor TV. A visual inspection device configured as described above has been put into practical use and is well known.

(Problem to be solved) However, in the above-mentioned system that simultaneously displays the image of the object to be inspected and the reference mark line on the monitor TV screen, the imaging magnification of the image of the object to be inspected changes due to the zooming of the television camera. On the other hand, since the dimensions of the reference mark lines are fixed, there is a problem in that the dimensions of the object to be inspected (for example, the size of defects) cannot be confirmed on a monitor television.

(Means for Solving the Problems) In order to solve the above problems, the present invention provides a table on which an object to be inspected is mounted, a means for imaging the object to be inspected, and a table for attaching the imaging means and the object to be inspected. a moving means for relative movement in a plane parallel to the reference mark, a monitor means connected to the imaging means, a mark line signal generating means for projecting a reference mark line on the monitor means, and an image of the object to be inspected projected by the imaging means. In a visual inspection device that is equipped with an image composition means that combines the image with a marked line image and displays it on a monitor screen, the imaging magnification of the imaging means is detected by the imaging magnification detection means, and the magnification signal from the imaging magnification detection means is Based on the image synthesis means, the dimensions of the marked line image projected from the image synthesis means are changed by the changing means in correspondence with the dimensions of the image of the object to be inspected. is detected by the imaging magnification detection means, and based on the magnification signal from the imaging magnification detection means, the dimensions of the marked line image projected from the image composition means are changed by the changing means in correspondence with the dimensions of the image of the object to be inspected. Therefore, a gauge line enlarged at a magnification corresponding to the enlargement magnification of the inspected object being enlarged and displayed is displayed on the monitor screen.

(Example) Embodiments of the present invention will be described below based on the drawings.

FIGS. 1 and 2 are block diagrams showing embodiments of the present invention,
FIG. 3 is a perspective view of a printed circuit board visual confirmation apparatus to which the present invention is applied.

This visual confirmation device is used to visually confirm a defective portion detected by a defect inspection device that inspects defects in a printed wiring board.

In the figure, (1) shows the entire visual confirmation device, and this visual confirmation device (1) is comprised of a main body (2) that houses electrical components, etc.
), a first table (3) on which a master board is positioned and placed, and a second table (4) on which a board to be inspected to be visually confirmed is placed.
) and a scanning pedestal (5) arranged to straddle both tables (3) and (4'') to the left and right, and a monitor screen section (6).

Inside the scanning mount (5), two imaging television cameras (7) (8) are arranged corresponding to both tables (3) (4), and both television cameras (7) (8) is configured to move synchronously in the left-right direction (X direction) by a driving means consisting of a ball screw (9). In addition, the scanning mount (5)
is configured to move in the front and rear direction (Y direction) on the main body (2) by a front and rear drive means.

The monitor screen section (6) has a monitor TV receiver (10) connected to each TV camera (7) and (8) individually.
(11) is arranged.

In FIG. 3, reference numeral (12) is an operator console, and (13) is a data recording section.

Next, the features of the present invention will be explained.

FIG. 1 is a block diagram showing the concept of the present invention.
) is an X-lens attached to the television cameras (7) and (8), and this zoom lens (15) is configured so that its zoom ratio can be changed by a lens drive motor (16) that can rotate in forward and reverse directions. Zoom lens (15) and TV camera (
An optical system (17) is arranged between 7 and 8 to increase the optical path length and change the optical axis by 90 degrees. The lens drive motor (16) is connected to the motor drive circuit (1
8) Drives forward or reverse rotation with the drive signal (D) from
Transmission means (19) consisting of a timing belt transmits the rotation.
to the zoom lens (15), and the zoom lens r(is
) is configured to change the zoom ratio (imaging magnification).

The lens drive motor (16) is equipped with a rotary enhancer (2
An imaging magnification detection means (K) consisting of 0) is attached,
This a-Talienkog (20) is a zoom lens (15
) corresponding to the zoom ratio, the imaging magnification is generated as a position pulse signal (L) of 12.

Video signal (R) from TV camera <7) (8) and position pulse signal (L4) from rotary encoder (20)
is input to the continuous scale synthesis circuit (22), and this continuous scale synthesis circuit (22) connects the television cameras (7) and (8).
The scale (24) according to the imaging magnification is added to the image (23) from
) are combined and displayed on the television reception fi(10)(11).

In addition, a scale movement signal (T) for changing and adjusting the display position of the scale (24) on both sides of the television receiver (10) and (11) is now input to the continuous scale synthesis circuit (22). ing. This scale movement signal (T)
is generated by a scale movement signal generating circuit (27) based on the operation of a scale movement means (25) such as a push button or a stick.

Figure 2 shows the continuous scale synthesis circuit (22). As shown in the diagram, this continuous scale synthesis circuit (22) includes a composite/to-sync circuit (28) and a scale calculation circuit (29).
, a scale generation circuit (30), and a position counter (31).
).

The Funposite synchronization circuit (28) consists of a synchronization signal (S) and an image signal (P), and a synchronization signal (
This separated synchronizing signal (S) is input to the scale generating circuit (30).

On the other hand, the position pulse signal from the rotary encoder (20)! (L) is input to the position counter (31), which calculates the imaging magnification of the zoom lens (15) geometrically from the position pulse signal (L), and uses the result as the imaging magnification information (Z ) as a scale calculation circuit (29
).

The scale calculation circuit (29) includes a position counter (31).
Imaging magnification information from fi! (Z) and the scale movement signal (T) from the scale movement signal generation circuit (27) are input, the dimensions of the scale (24) corresponding to the imaging magnification of the zoom lens (15) are calculated, and the scale information is calculated. Signal (M
) is generated.

The scale generation circuit (30) measures the timing of the synchronization signal (S) and the scale information signal (M) and controls the changeover switch (32).
) and the scale information signal (M) to create a composite signal (C).

Note that the scale displayed on the monitor screen is the 4th scale.
In addition to the cross-shaped graduation lines shown in Figure (A), the superimposed quadrilaterals of different sizes shown in Figure 4 (B), and Figure 4 (
Concentric circular marked lines shown in C) can be considered.

When visually inspecting a printed wiring board using this apparatus (1), a master board is positioned and placed on a first table (3) and a board to be inspected is placed on a second table. Then, based on data from a defect inspection device (not shown), the television cameras (7) and (8) are moved to positions corresponding to the defect positions on the master board and the board to be inspected, and the television receiver (10) is shown on the master board. The pattern is also received f
i(11) respectively display the patterns on the substrate to be inspected.

Then, the defective portion of the pattern on the substrate to be inspected is measured using a scale displayed on the television receiver fi (11).

At this time, if the zoom ratio of the television camera (7) < 8) is changed depending on the size of the defect on the board to be inspected, the dimensions of the scale displayed on the monitor screen (11) will change accordingly. This is automatically changed, and the defect method on the board to be inspected can be visually confirmed on the monitor screen (11).

In this case, the zoom ratios of the television cameras (7) and (8) and the scales displayed on the receivers (10 and 11) may be configured to change synchronously for the master board and for the test board. , TV camera for the board to be inspected (
8) and image reception If! It is also possible to adopt a configuration in which only the item (11) is changed.

In the above embodiment, the zoom lens (15) is used by changing its imaging magnification continuously, and the continuously changing imaging magnification information is transmitted to the rotary encoder that detects the amount of rotation of the lens drive motor (16). As shown in FIG. (33) and position detection blades (34) are placed on the timing belt of the transmission means (19).
) by repeatedly operating the two microswitches (32) and (33), the zoom lens (15) is configured to be used by switching between the long focus side and the short focus side, and the zoom lens (15) Micro switch (32) (
33) may be used to switch the scale dimensions displayed on the monitor screen. In this case, the microswitches (32) (33) and the position detection blade (34) serve as the imaging magnification detection means (K).

FIG. 6 shows an example in which the present invention is applied to a table-type length measuring device. A moving means (45) equipped with an imaging television camera (44) provided above, and a moving amount reading device (45) for reading and outputting the moving amount in the X direction and the moving amount in the Y direction of this moving means (45). 46) and a television receiver for monitoring (47) connected to a television camera (44).

The table (43) has a transparent plate (48) that is a combination of a milky-white light diffusion plate and a plus plate, and a fluorescent lamp (not shown) for illumination placed below the transparent plate (48). It is configured to illuminate an object to be inspected, such as a sheet-like original plate (49), placed on a light-transmitting plate (48) from below. In addition, a ring-shaped illumination device (not shown) is disposed at the tip of the television camera (44), and a light-transmitting plate (48) is provided.
) can be illuminated from both sides.

The moving means (45) includes a pair of rails (50) (50) arranged in parallel on both left and right sides of the table (43); The hook is passed over the second rail (50) (50) and moved in the X direction along the pedestal (51) that is movable in the Y direction and the 1-rule (52) on the pedestal (51). A base (53) that fixedly supports the television camera (44), and a drive handle that moves the frame (51) and base (53), respectively, via drive transmission means (not shown). (54) (5
5), and an X parallel to the transparent plate (48)
- The television camera (44) is configured to be movable within the Y plane.

The movement amount reading device (46) is connected to the drive handle (54) and the drive handle (55), respectively, and has separate linear encoders (
(not shown) and a process counter (56) connected to these linear encoders, inputting the output of the linear encoder to the process counter (56),
The process counter (56) performs arithmetic processing and the result is
A process counter (56
) is configured to be displayed on the display section (57).

In the above device, the television receiver (47)
The task of matching the inspection point of the object to be inspected and the reference mark displayed on the screen is repeated several times, and the TV camera (44
) to measure the length.

In such a length measuring device, when processing the images to display both images taken by the television camera (44) on the monitor screen, the same processing as in the above embodiment is performed, and the scale of the dimension corresponding to the zoom ratio is displayed on the screen. By displaying the pattern, pattern dimensions, etc. can be visually measured.

In each of the above embodiments, the image of the object to be inspected is fixedly displayed on the monitor screen, and the scale is moved vertically and horizontally with respect to the image of the object to be inspected to align the origin and visually check. However, the scale is displayed fixedly on the monitor screen and the TV camera is moved relative to the object to be inspected.
The origin of the object to be inspected may be aligned with the reference mark line for visual confirmation.

(Effects) The present invention includes a table on which an object to be inspected is mounted, a means for imaging the object to be inspected, a moving means for relatively moving the imaging means and the object to be inspected within a plane parallel to the table, and A monitor means connected to the imaging means, a mark line signal generating means for projecting a reference mark line on the monitor means, and an image that is displayed on a monitor screen by combining the image of the object to be inspected and the mark line image projected by the imaging means. In a visual inspection device equipped with a composition means, the imaging magnification of the imaging means is detected by the imaging magnification detection means, and based on the magnification signal from the imaging magnification detection means, the dimensions of the marked line image projected by the image composition means are determined by the imaging magnification detection means. Since it is configured to be changed by the changing means in accordance with the dimensions of the inspection object image, the gauge line can be changed on the monitor screen with dimensions proportional to the imaging magnification of the inspection object displayed on the monitor screen. It can be displayed simultaneously with the object to be inspected, and the dimensions of the part to be inspected can be visually confirmed on the monitor screen.

[Brief explanation of the drawing]

The drawings show embodiments of the present invention; FIG. 1 is a block diagram conceptually showing the device of the present invention, FIG. 2 is a block diagram of a continuous scale synthesis circuit, and FIG. 3 is a visual confirmation device to which the present invention is applied. 4(A) to 4(C) are the scale patterns displayed on the monitor screen, FIG. 5 is the main part configuration diagram of the modified example, and FIG. 6 is the other application example. FIG. 2 is a perspective view of the length measuring device shown in FIG. 3.4.43...Table, 7.8-44..Imaging means, 10.11.47..Monitoring means, 9.45.
. . . Moving means, 22 . . . Image synthesizing means, 23 . . . Inspection object image, 24 . K: Imaging magnification detection means. Mo 1 diagram Ka 6th figure 5 2nd kyo

Claims (1)

[Scope of Claims] 1. A table on which an object to be inspected is mounted, means for capturing an image of the object to be inspected, a moving means for relatively moving the image capturing means and the object to be inspected within a plane parallel to the table; A monitor means connected to the imaging means, a mark line signal generating means for projecting a reference mark line on the monitor means, and an image that is displayed on a monitor screen by combining the image of the object to be inspected and the mark line image projected by the imaging means. In a visual inspection device equipped with a composition means, the imaging magnification of the imaging means is detected by the imaging magnification detection means, and the dimensions of the marked line image projected by the image composition means are determined based on the magnification signal from the imaging magnification detection means. A marking line display device for a visual inspection device configured to be changed by a changing means in accordance with the dimensions of an image of an inspection object.