JPS63120083A - Grinding wheel - Google Patents

Abstract

PURPOSE:To prevent the surface of a workpiece from being scratched before anything happens, reduce the damage of an abrasive grain layer in the production of impact force and prolong the life of a grinding wheel by forming the abrasive grain layer on elastic supporting materials fixed to a metallic base so as to make the contact of a magnetic abrasive grain layer with the surface of a workpiece elastic. CONSTITUTION:Many cylindrical elastic supporting materials 2 are weldedly fixed to a metallic base 1 in the peripheral direction in equally spaced relation. Each elastic supporting material 2 is hollowly formed with a thin metallic plate and provided with an abrasive grain layer 3 of a fixed thickness on the top of the outer peripheral surface. Thus the contact of the abrasive grain layer 3 with a workpiece becomes elastic by elastically supporting the abrasive grain layer 3 for eliminating the sharp scooping by the projecting section of the workpiece surface, and as a result the workpiece surface is prevented from being scratched. At the same time this leads to the elimination of the large force exertion only to one part of the abrasive grain layer 3 in grinding for hardly breaking the layer 3, and as a result the life of a grinding wheel is prolonged.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a grinding wheel used for precision surface grinding of silicon wafers, ceramic composite materials, etc.

``Conventional technology'' When surface grinding silicon wafers or ceramic composite materials, extremely high surface finish precision is required. It is necessary to reduce this to prevent warpage and compositional modification of the workpiece.

Conventionally, this type of grinding wheel uses a grinding wheel with an extremely narrow abrasive grain layer, and in some cases, by forming a large number of slits in this abrasive grain layer, the abrasive grain layer and workpiece are The aim was to minimize the contact area with the gas to improve discharge performance and reduce heat generation.

"Problems to be Solved by the Invention" However, if the width of the abrasive layer is narrowed or slits are made as described above, the strength of the abrasive layer will inevitably decrease, and the abrasive layer will The disadvantage was that the layers were easily damaged.

In addition, if the workpiece material has poor flatness, the abrasive grain layer may come into point contact with the convex parts of the workpiece material, causing damage such as scratches on the surface of the workpiece material that is difficult to recover. This was a contributing factor to the deterioration of the yield of cut materials.

``Object of the Invention'' The present invention has been made in view of the above-mentioned circumstances, and it does not cause damage such as scratches to the surface of the workpiece even when the workpiece has poor flatness. The purpose is to provide a grinding wheel that has high strength and is hard to break.

"Means for Solving the Problems" The grinding wheel of the present invention is characterized in that an elastic support material is fixed to a base metal, and an abrasive grain layer is formed on this elastic support material.

``Example'' Each example of the present invention will be described in detail below with reference to the drawings.

(First Embodiment) FIGS. 1 and 2 show a cup-shaped grinding wheel according to a first embodiment of the present invention.

Reference numeral l in the figure is a base metal, and on the end face of this base metal 1, a large number of cylindrical elastic supports 2 are fixed by welding at regular intervals with their axes aligned in the circumferential direction of the base metal 1. has been done. The elastic support member 2 is made by rolling a thin elastic metal plate such as SUS spring steel or phosphor bronze into a cylindrical shape and joining both ends thereof. The wall thickness and diameter of this elastic support member 2 are set so as to obtain optimal elasticity for grinding.

The outer peripheral surface of the upper end portion of the elastic support member 2 in FIG.
Diamond or C in the metal plating phase such as i, Go, etc.
An abrasive grain layer 3 made of dispersed superabrasive grains such as BN is formed to have a constant thickness.

To manufacture such a grinding wheel, first, the elastic support material 2... is welded and fixed to the base l as described above, and then the abrasive grain layer 3... of the elastic support material 2... Masking is applied to the entire surface except the part to be formed. Next, this base metal 1 is immersed in a Ni (or Co) plating solution in which superabrasive grains are uniformly dispersed, and the base metal 1 is connected to the cathode of a power source, and a connection is made between the base metal 1 and the anode immersed in the plating solution. Turn on electricity. And elastic support material 2
When a metal plating phase with uniformly dispersed superabrasive grains is deposited on the surface of the metal plating to a predetermined thickness, the electricity is stopped, the metal is removed from the plating solution, washed with water, the masking is removed, and dressing etc. Perform the following treatment.

In a grinding wheel with such a configuration, the abrasive grain layer 3
... is formed into a convex curved surface, so the contact area with the workpiece is small, chip evacuation is good, and the amount of heat generated is small.

Further, since the elastic support members 2 are made of metal thin plates and are hollow, the cooling efficiency by the grinding fluid is high, and warpage and compositional modification of the workpiece can be prevented.

In addition, the abrasive grain layer 3... is elastically supported by the elastic support material 2...
・Since it supports the workpiece, even if the workpiece has poor flatness and slight irregularities, it will not sharply gouge or damage the convexities on the surface of the workpiece, and will not cause damage such as scratches.

Furthermore, since the abrasive grain layer 3 is firmly electrodeposited on the elastic support material 2, its strength is higher than that of conventional grindstones in which a narrow abrasive grain layer is directly formed on the base metal. Moreover, since the abrasive grain layer 3 is elastically supported, a large force is not applied to only a part of the abrasive grain layer 3 during grinding, and the abrasive grain layer 3 is even less likely to be damaged.

Furthermore, in this grinding wheel, by appropriately changing the wall thickness and diameter of the elastic support material 2..., the abrasive grain layer 3...
・The elasticity that supports the abrasive grain layer 3 against the workpiece material
It is possible to change the pressure contact force of ..., and it is easy to select the optimum grinding conditions.

(Second Embodiment) FIG. 3 shows the main parts of a grinding wheel according to a second embodiment of the present invention.

In this embodiment, the elastic support material 2 is
The difference is that the thin metal plate IO is bent into a U-shape and used as an elastic support member (10), whereas it was cylindrical.

Both ends of this thin metal plate 10 are inserted into 17411, 11 formed on the end face of the base metal l and brazed.

In the grinding wheel of this second embodiment, the thin metal plate l
After forming the abrasive grain layer 3 on O, it is sufficient to attach this to the base metal 1. Therefore, it has the advantage of being easier to manufacture than the first embodiment, in which the elastic support material is fixed to the base metal 1, masking is performed, and then the abrasive grain layer is electrodeposited.

Furthermore, in this second embodiment, by changing the interval between the pair of grooves t1.1t into which the thin metal plate 10 is inserted, the fourth
The curvature of the thin metal plate lO can be changed as shown in FIG. Therefore, when the work material is hard, the supporting force of the abrasive grain layer by the elastic support material is strengthened as shown in Fig. 5, and on the contrary, when the work material is soft, the supporting force is increased as shown in Fig. 4. It is easy to select the optimal grinding conditions, such as weakening, depending on the type of workpiece material.

(Third example) FIG. 6 shows a third embodiment of the present invention.

In this embodiment, an elastic support material 20 on which an abrasive grain layer 3 is formed
is characterized in that it is removable from the base metal 1. This elastic support member 20 is composed of a thin metal plate 2OA bent into a U-shape and a spacer 20B sandwiched between both ends of the thin metal plate 20A.
It is fixed to the outer peripheral surface of the base metal 1 by two screws 21 passing through the spacer 2013.

According to this grinding wheel, when the abrasive grain layer 3 is worn out, the entire elastic support material 20 can be easily replaced, and the sharpness can be restored again.

Note that instead of the spacer 20B, as shown in FIG. 7, the end of the base metal 1 is sandwiched between thin metal plates (elastic support material) 22 on which the abrasive grain layer 3 is formed, and a screw 23 passing through these is used. The thin metal plate 22 may be fixed.

(Fourth example) FIG. 8 shows a fourth embodiment of the present invention.

The elastic support material 30 in this embodiment includes a urethane resin 1, an elastic body 3 having elasticity, such as elastic rubber, embedded in the base metal 1.
0A, and a curved metal plate 30B bonded to the upper surface of the elastic body 30A in the drawing. An abrasive grain layer 3 is formed on the upper surface of this metal plate 30B.

With such an elastic support material 30, there is no risk of deformation even if handled incorrectly, compared to the above-mentioned elastic support material formed by rolling a thin metal plate.

In addition, also in the above-mentioned first to third embodiments, the hollow portion formed by the thin metal plate may be filled with the same elastic body as in this embodiment. Thereby, deformation of the elastic support members (2, 10, 20, 22) can be prevented as in this embodiment.

(Fifth Embodiment) FIGS. 9 and 10 show a fifth embodiment of the present invention.

The elastic support member 40 in this embodiment is formed into a cylindrical shape from an elastic thin metal plate, and the abrasive grain layer 3 is electrodeposited on the entire outer peripheral surface of the elastic support member 40 . The base metal 1 also has a gutter-like groove 4 into which the elastic support member 40 fits without any gap.
1 is formed.

The elastic support member 40 is fitted into this groove 41 and is fixed by a fitting 42 inserted into the hollow portion. This fitting 42 is longer than the elastic support 40;
Both ends thereof are adapted to be fastened to the base metal 1 by screws 43 and 43, respectively.

In the fifth embodiment with such a configuration, when a part of the abrasive grain layer 3 is worn out, the screws 43 and 43 are loosened and the elastic support member 40 is removed.
Rotate slightly as shown by the arrow in Figure 9. This results in
The unworn portion of the abrasive grain layer 3 is brought into contact with the workpiece, and the sharpness of the whetstone can be restored. Naturally, the elastic support material 40 can also be easily replaced.

(Sixth Embodiment) FIG. 11 shows a sixth embodiment of the present invention. In the grinding wheel of the first embodiment (FIG. 1) described above, the elastic supports 2 are arranged with their axes aligned in the circumferential direction of the base metal 1, but in this sixth embodiment, they are arranged radially. It is characterized by being In this grinding wheel, the contact area between the abrasive grain layer 3 and the workpiece is the same as in the first embodiment, but the area to be ground is larger, so it is difficult to perform grinding with an extremely shallow depth of cut. suitable for

In addition, instead of arranging the elastic supports 2 radially, as shown in FIG. In that case, as the grinding wheel rotates, the elastic support material 2.
... allows the grinding fluid to be sprinkled on the outside of the grinding wheel.
Chip discharge performance can be further improved.

(Seventh Embodiment) FIGS. 13 and 14 show a cup-shaped grindstone according to a seventh embodiment of the present invention.

In this grindstone, a thin metal pipe (elastic support material) 50 is welded to the end face of the base metal 1 so as to be concentric with the base metal 1 and has a length covering the entire circumference in the circumferential direction. Layer 3 was electrodeposited. This grindstone also provides the same effects as the other embodiments. In addition, the abrasive grain layer 3 is connected to the pipe 50.
In addition to forming the abrasive layer 3 over the entire circumference, the abrasive layer 3 may be formed into segment-shaped abrasive layer chips, and the abrasive layer chips may be bonded to the pipe 50 at regular intervals. In that case, the material of the pipe 50 may be an elastic resin or the like.

In addition, in all of the embodiments described above, the abrasive grain layer and the elastic support material were separate, but instead, a cylindrical or pipe-shaped abrasive grain layer was formed by electroforming, and this abrasive grain layer was It is also possible to weld the abrasive grain layer as is to the base metal and use the elasticity of the abrasive grain layer itself to function as an elastic support material.

In addition, as a method for forming an abrasive grain layer on a non-conductive elastic support material such as resin, a thin metal layer such as copper is formed on the elastic support material by electroless plating, and the abrasive grain layer is placed on this metal layer. Other methods include electrodepositing the layer or pasting an abrasive layer sheet containing diamond powder onto an elastic support.

Although the grinding wheels described so far have all been cup-shaped, the present invention is not limited to this, and can also be implemented as a wheel-shaped grinding wheel.

"Experiment example" Next, the effects of the present invention will be demonstrated by giving experimental examples.

0.05~0.1jvlc7) SUS spring w411=Yotte, loamφXl0 50 cylinders (elastic support material) with a length of 1m were made, and these cylinders were attached in the circumferential direction to the end face of a 200mmφ disc-shaped cup-shaped steel base metal. Welded them side by side.

Then, parts other than the outer peripheral surface of the upper half of the cylinder were masked.

Next, this base metal is immersed in a Ni plating solution in which 2 to 4 μl of diamond superabrasive grains are dispersed, connected to the cathode of a power source, and current is applied between the base metal and the anode placed opposite to each other to form a cylinder. An abrasive grain layer containing superabrasive grains was formed on the outer peripheral surface of the upper half. The concentration degree of the obtained abrasive grain layer was 50.

Next, using this grinding wheel, surface grinding (back grinding) of a 4-inch silicon wafer was performed under the following grinding conditions.
I did it.

Grinding conditions: peripheral speed 3000 chips/min.

Notch 20μ shoulder Feed speed 200mttr/min.

As a result, the finished surface roughness was 0.2μan, the wear amount of the 1Qal abrasive layer was about 5μ, and the frequency of dressing required was 1QQQ (every 1 piece).In addition, there were no scratches or cloudiness on the surface of the Uni T after grinding. I couldn't see it.

"Effects of the Invention" Since the grinding wheel of the present invention has an elastic support material fixed to the base metal and an abrasive grain layer formed on the elastic support material, it exhibits the following excellent effects.

■Since the abrasive grain layer hits the workpiece material elastically, no damage such as scratches is caused to the surface of the workpiece material.

■Since the abrasive grain layer is elastically supported, the abrasive grain layer will not be damaged even when subjected to impact, and has a long life.

- By selecting the elastic body, it is possible to change the contact strength of the abrasive grain layer to the work material, and it is possible to select the optimal grinding conditions for the work material.

[Brief explanation of the drawing]

1 and 2 are a plan view and a vertical sectional view showing a grinding wheel according to a first embodiment of the present invention, and FIGS. 3 to 5 are sectional views showing essential parts of a grinding wheel according to a second embodiment, respectively. , FIG. 6 and FIG. 7 are respectively sectional views of the main parts of the grinding wheel of the third embodiment, FIG. 8 is a sectional view of the main parts of the fourth embodiment, and FIGS. 9 and 10 are the sectional views of the main parts of the grinding wheel of the fifth embodiment. A sectional view and a plan view of the example, FIG. 1t and FIG. 12 are respectively plan views showing a part of the grinding wheel of the sixth embodiment, and FIGS. 13 and 14 are plan views of the grinding wheel of the seventh embodiment, respectively. and a cross-sectional view. l...base metal, 2,1 0.20,22,30.40.50...elastic support material, 3...abrasive grain layer.

Claims (3)

[Claims] (1) A grinding wheel characterized in that an elastic support material is fixed to a base metal, and an abrasive grain layer is formed on this elastic support material. (2) The grinding wheel according to claim 1, wherein the elastic support material is a thin elastic metal plate bent so as to be convex toward the abrasive grain layer. (3) Claim 1 or 2, characterized in that the elastic support material is removable from the base metal.
Grinding wheel described in section.