JPS63120030U - - Google Patents
Info
- Publication number
- JPS63120030U JPS63120030U JP1072387U JP1072387U JPS63120030U JP S63120030 U JPS63120030 U JP S63120030U JP 1072387 U JP1072387 U JP 1072387U JP 1072387 U JP1072387 U JP 1072387U JP S63120030 U JPS63120030 U JP S63120030U
- Authority
- JP
- Japan
- Prior art keywords
- clean
- clean room
- ceiling
- exhaust port
- taken
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987010723U JPH0416099Y2 (enExample) | 1987-01-29 | 1987-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987010723U JPH0416099Y2 (enExample) | 1987-01-29 | 1987-01-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63120030U true JPS63120030U (enExample) | 1988-08-03 |
| JPH0416099Y2 JPH0416099Y2 (enExample) | 1992-04-10 |
Family
ID=30797284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987010723U Expired JPH0416099Y2 (enExample) | 1987-01-29 | 1987-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416099Y2 (enExample) |
-
1987
- 1987-01-29 JP JP1987010723U patent/JPH0416099Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0416099Y2 (enExample) | 1992-04-10 |