JPS63120030U - - Google Patents
Info
- Publication number
- JPS63120030U JPS63120030U JP1072387U JP1072387U JPS63120030U JP S63120030 U JPS63120030 U JP S63120030U JP 1072387 U JP1072387 U JP 1072387U JP 1072387 U JP1072387 U JP 1072387U JP S63120030 U JPS63120030 U JP S63120030U
- Authority
- JP
- Japan
- Prior art keywords
- clean
- clean room
- ceiling
- exhaust port
- taken
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Ventilation (AREA)
Description
第１図は、この考案をダウンフロー型クリーン
トンネルに適用した一実施例の清浄室装置の概略
縦断面図、第２図は同じくコンベンシヨナル型ク
リーントンネルに適用した他の実施例の第１図相
当図、第３図は、従来例の第１図相当図、第４図
は、従来例の第２図相当図である。
１……クリーンルーム、１Ｔ１……エピタキシ
ヤル装置側天井、３……排気口、６……排風機。
Fig. 1 is a schematic longitudinal cross-sectional view of a clean room device according to one embodiment in which this invention is applied to a down-flow type clean tunnel, and Fig. 2 is a first view of another embodiment in which this invention is similarly applied to a conventional type clean tunnel. 3 is a diagram equivalent to FIG. 1 of the conventional example, and FIG. 4 is a diagram equivalent to FIG. 2 of the conventional example. 1...Clean room, 1T 1 ...Epitaxial equipment side ceiling, 3...Exhaust port, 6...Exhaust fan.
Claims (1)
側の天井の一部に排気口を設け、排風機により吸
気し排除する構成としたことを特徴とする清浄室
装置。 A clean room device in a clean tunnel system, characterized in that an exhaust port is provided in a part of the ceiling on the side of the work equipment, and the air is taken in and removed by an exhaust fan.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987010723U JPH0416099Y2 (en) | 1987-01-29 | 1987-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987010723U JPH0416099Y2 (en) | 1987-01-29 | 1987-01-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63120030U true JPS63120030U (en) | 1988-08-03 |
| JPH0416099Y2 JPH0416099Y2 (en) | 1992-04-10 |
Family
ID=30797284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987010723U Expired JPH0416099Y2 (en) | 1987-01-29 | 1987-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416099Y2 (en) |
-
1987
- 1987-01-29 JP JP1987010723U patent/JPH0416099Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0416099Y2 (en) | 1992-04-10 |