JPS63120030U - - Google Patents

Info

Publication number
JPS63120030U
JPS63120030U JP1072387U JP1072387U JPS63120030U JP S63120030 U JPS63120030 U JP S63120030U JP 1072387 U JP1072387 U JP 1072387U JP 1072387 U JP1072387 U JP 1072387U JP S63120030 U JPS63120030 U JP S63120030U
Authority
JP
Japan
Prior art keywords
clean
clean room
ceiling
exhaust port
taken
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1072387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416099Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987010723U priority Critical patent/JPH0416099Y2/ja
Publication of JPS63120030U publication Critical patent/JPS63120030U/ja
Application granted granted Critical
Publication of JPH0416099Y2 publication Critical patent/JPH0416099Y2/ja
Expired legal-status Critical Current

Links

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  • Ventilation (AREA)
JP1987010723U 1987-01-29 1987-01-29 Expired JPH0416099Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987010723U JPH0416099Y2 (enrdf_load_stackoverflow) 1987-01-29 1987-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987010723U JPH0416099Y2 (enrdf_load_stackoverflow) 1987-01-29 1987-01-29

Publications (2)

Publication Number Publication Date
JPS63120030U true JPS63120030U (enrdf_load_stackoverflow) 1988-08-03
JPH0416099Y2 JPH0416099Y2 (enrdf_load_stackoverflow) 1992-04-10

Family

ID=30797284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987010723U Expired JPH0416099Y2 (enrdf_load_stackoverflow) 1987-01-29 1987-01-29

Country Status (1)

Country Link
JP (1) JPH0416099Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0416099Y2 (enrdf_load_stackoverflow) 1992-04-10

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