JPS63119666U - - Google Patents

Info

Publication number
JPS63119666U
JPS63119666U JP1200387U JP1200387U JPS63119666U JP S63119666 U JPS63119666 U JP S63119666U JP 1200387 U JP1200387 U JP 1200387U JP 1200387 U JP1200387 U JP 1200387U JP S63119666 U JPS63119666 U JP S63119666U
Authority
JP
Japan
Prior art keywords
vacuum evaporation
start signal
film
evaporation apparatus
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1200387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1200387U priority Critical patent/JPS63119666U/ja
Publication of JPS63119666U publication Critical patent/JPS63119666U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1200387U 1987-01-28 1987-01-28 Pending JPS63119666U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1200387U JPS63119666U (enrdf_load_stackoverflow) 1987-01-28 1987-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1200387U JPS63119666U (enrdf_load_stackoverflow) 1987-01-28 1987-01-28

Publications (1)

Publication Number Publication Date
JPS63119666U true JPS63119666U (enrdf_load_stackoverflow) 1988-08-02

Family

ID=30799728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1200387U Pending JPS63119666U (enrdf_load_stackoverflow) 1987-01-28 1987-01-28

Country Status (1)

Country Link
JP (1) JPS63119666U (enrdf_load_stackoverflow)

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