JPS63119665U - - Google Patents

Info

Publication number
JPS63119665U
JPS63119665U JP13861286U JP13861286U JPS63119665U JP S63119665 U JPS63119665 U JP S63119665U JP 13861286 U JP13861286 U JP 13861286U JP 13861286 U JP13861286 U JP 13861286U JP S63119665 U JPS63119665 U JP S63119665U
Authority
JP
Japan
Prior art keywords
crucible
main component
whose main
crucible body
induction coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13861286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13861286U priority Critical patent/JPS63119665U/ja
Publication of JPS63119665U publication Critical patent/JPS63119665U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
JP13861286U 1986-09-11 1986-09-11 Pending JPS63119665U (me)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13861286U JPS63119665U (me) 1986-09-11 1986-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13861286U JPS63119665U (me) 1986-09-11 1986-09-11

Publications (1)

Publication Number Publication Date
JPS63119665U true JPS63119665U (me) 1988-08-02

Family

ID=31043759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13861286U Pending JPS63119665U (me) 1986-09-11 1986-09-11

Country Status (1)

Country Link
JP (1) JPS63119665U (me)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59203644A (ja) * 1983-05-06 1984-11-17 Mitsubishi Electric Corp 蒸発源用るつぼ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59203644A (ja) * 1983-05-06 1984-11-17 Mitsubishi Electric Corp 蒸発源用るつぼ

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