JPS63119664U - - Google Patents
Info
- Publication number
- JPS63119664U JPS63119664U JP808487U JP808487U JPS63119664U JP S63119664 U JPS63119664 U JP S63119664U JP 808487 U JP808487 U JP 808487U JP 808487 U JP808487 U JP 808487U JP S63119664 U JPS63119664 U JP S63119664U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- flange
- support member
- attached
- current introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP808487U JPH033573Y2 (en:Method) | 1987-01-22 | 1987-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP808487U JPH033573Y2 (en:Method) | 1987-01-22 | 1987-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63119664U true JPS63119664U (en:Method) | 1988-08-02 |
| JPH033573Y2 JPH033573Y2 (en:Method) | 1991-01-30 |
Family
ID=30792139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP808487U Expired JPH033573Y2 (en:Method) | 1987-01-22 | 1987-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH033573Y2 (en:Method) |
-
1987
- 1987-01-22 JP JP808487U patent/JPH033573Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH033573Y2 (en:Method) | 1991-01-30 |