JPS63119237U - - Google Patents
Info
- Publication number
- JPS63119237U JPS63119237U JP1104887U JP1104887U JPS63119237U JP S63119237 U JPS63119237 U JP S63119237U JP 1104887 U JP1104887 U JP 1104887U JP 1104887 U JP1104887 U JP 1104887U JP S63119237 U JPS63119237 U JP S63119237U
- Authority
- JP
- Japan
- Prior art keywords
- process tube
- introduced gas
- introduction pipe
- gas introduction
- exhaust pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1104887U JPS63119237U (es) | 1987-01-27 | 1987-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1104887U JPS63119237U (es) | 1987-01-27 | 1987-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63119237U true JPS63119237U (es) | 1988-08-02 |
Family
ID=30797913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1104887U Pending JPS63119237U (es) | 1987-01-27 | 1987-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63119237U (es) |
-
1987
- 1987-01-27 JP JP1104887U patent/JPS63119237U/ja active Pending