JPS6311911A - Liquid-crystal element - Google Patents
Liquid-crystal elementInfo
- Publication number
- JPS6311911A JPS6311911A JP15514986A JP15514986A JPS6311911A JP S6311911 A JPS6311911 A JP S6311911A JP 15514986 A JP15514986 A JP 15514986A JP 15514986 A JP15514986 A JP 15514986A JP S6311911 A JPS6311911 A JP S6311911A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- electrodes
- inter
- film
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 24
- 239000005262 ferroelectric liquid crystals (FLCs) Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000011521 glass Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- -1 phenyl ester Chemical class 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は液晶表示素子や液晶−光シヤツター等に用いら
れる液晶素子に関し、さらに詳しくは強誘電性液晶を用
いた液晶素子のセル基板上の電極構成に関するものであ
る。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a liquid crystal element used in a liquid crystal display element, a liquid crystal light shutter, etc. This relates to the electrode configuration.
[開示の概要コ
本明細書及び図面は、強誘電性液晶を用いた液晶素子に
おいて、ストライプ電極間のスペース部に低抵抗金属線
を形成して遮光することにより、全面に渡って表示ムラ
のない鮮明な画像を得ることができ、高速表示も可能と
する技術を開示するものである。[Summary of the Disclosure] This specification and drawings disclose that in a liquid crystal element using ferroelectric liquid crystal, display unevenness can be prevented over the entire surface by forming a low resistance metal wire in the space between the stripe electrodes to block light. The present invention discloses a technology that enables the acquisition of clear images and high-speed display.
〔従来の技術]
従来、この種の液晶表示素子の構造としては、ガラス基
板上に蒸着した透明導電性膜をストライプ状に加工して
透明電極とし、しかる後、前記ガラス基板上に液晶分子
の分子方向を一定とするための配向膜を塗布すると共に
、前記透明電極を対向させ、かつ直交する様に配置し、
2枚の基板間に強誘電性液晶を挟持した単純マトリック
ス構造とするものであった。[Prior Art] Conventionally, the structure of this type of liquid crystal display element is to process a transparent conductive film deposited on a glass substrate into stripes to form a transparent electrode, and then to form liquid crystal molecules on the glass substrate. Applying an alignment film to keep the molecular direction constant, and arranging the transparent electrodes to face each other and orthogonally cross each other,
It had a simple matrix structure with a ferroelectric liquid crystal sandwiched between two substrates.
[発明が解決しようとする問題点1
強誘電性液晶は、初期配向時に2つの安定状態のうちの
どちから一方に配向する。しかしながら、駆動時に電圧
のかからない電極間のスペース部においては、この2つ
の安定状態が常に混在したままとなるため、素子として
の表示特性が著しく低下してしまうという欠点があった
。[Problem to be Solved by the Invention 1] A ferroelectric liquid crystal is oriented from one of two stable states at the time of initial alignment. However, in the space between the electrodes to which no voltage is applied during driving, these two stable states always coexist, resulting in a drawback that the display characteristics of the device are significantly degraded.
本発明は、このような従来例における欠点に鑑みなされ
たもので、全面に渡って表示ムラのない鮮明な画像を得
ることができ、且つ表示面積を大きくしても高速表示が
可能な液晶素子を提供することを目的とするものである
。The present invention was made in view of the drawbacks of the conventional examples, and provides a liquid crystal element that can provide a clear image without display unevenness over the entire surface and that can display at high speed even if the display area is increased. The purpose is to provide the following.
c問題点を解決するための手段]及び[作用]上記問題
点を解決するための手段を、実施例に対応する第1図を
用いて説明すると、本発明は、基板l上にストライプ状
に形成された透明電極2に平行に接触し、且つこの透明
電極間のスペース部を覆うように形成された低抵抗金属
膜3を設けたことを特徴とする液晶素子である。このよ
うに、電極間のスペース部を低抵抗の金属膜によって覆
うことにより、強誘電性液晶の2つの安定状態が混在す
る領域をなくし、且つスペース部を遮光することができ
る。この結果、液晶の配向ムラをなくし、鮮明な画像を
得ることができる。また、この低抵抗の金属膜を遮光層
とすることにより、表示面積を大きくしても高速表示が
可能になる。Means for Solving Problems c] and [Operation] Means for solving the above problems will be explained using FIG. 1 corresponding to the embodiment. This liquid crystal element is characterized in that a low-resistance metal film 3 is provided that is in parallel contact with the formed transparent electrodes 2 and covers the space between the transparent electrodes. By covering the space between the electrodes with a low-resistance metal film in this manner, it is possible to eliminate a region where two stable states of the ferroelectric liquid crystal coexist and to shield the space from light. As a result, alignment unevenness of the liquid crystal can be eliminated and clear images can be obtained. Furthermore, by using this low-resistance metal film as a light-shielding layer, high-speed display is possible even if the display area is increased.
[実施例]
第1図は本発明の液晶素子に用いられる基板の断面図で
ある。第1図において、lはガラスまたはプラスチック
等の基板、2はIn203 、5n02 、またはIT
O(Indium−Tin−Oxide)等の透明導電
膜をスパッタリング蒸着法やイオンブレーティング蒸着
法等を用いて蒸着した後1通常のフォトリソグラフィー
及びエツチング技術を用いてストライプ状に形成した透
明電極、3はAIl、 Cr、 Au等の金属膜、4は
5i02 、 TiO2、Ti2O5、Zr0z等の無
機絶縁膜、5はポリイミド、ポリビニルアルコール等の
配向膜である。[Example] FIG. 1 is a cross-sectional view of a substrate used in the liquid crystal element of the present invention. In Fig. 1, l is a substrate made of glass or plastic, and 2 is In203, 5n02, or IT.
After depositing a transparent conductive film such as O (Indium-Tin-Oxide) using a sputtering deposition method or an ion-blating deposition method, 1. A transparent electrode formed in a stripe shape using ordinary photolithography and etching techniques; 3. 4 is a metal film such as Al, Cr, or Au; 4 is an inorganic insulating film such as 5i02, TiO2, Ti2O5, or Zr0z; and 5 is an alignment film such as polyimide or polyvinyl alcohol.
第1図に示すように1本発明は基板l上に形成されたス
トライプ状の透明電極2に平行に接触し、且つ電極間の
スペース部(図中A)を覆うように金属膜3を形成して
電極間を遮光したものである。このような基板2枚を、
電極か対向し、且る。As shown in FIG. 1, the present invention forms a metal film 3 so as to be in parallel contact with striped transparent electrodes 2 formed on a substrate 1 and to cover the space between the electrodes (A in the figure). The space between the electrodes is shielded from light. Two such boards,
The electrodes are facing each other.
実施例1
ガラス基板上に高周波スパッタ法によりITO膜100
0Aを蒸着し、ポジ型レジスト(AZ−1370Hoe
chst社製)をスピンナーを用いてlpm塗布し、プ
レベークした。このレジスト層上にマスク巾80grs
、マスク部のピッチ100 p、mのストライプ状マ
スクを用いて露光した0次いで現像水洗してストライプ
パターンを形成した後、塩化第2鉄と塩酸と水の混合液
でITO膜をエツチングした。Example 1 ITO film 100 was formed on a glass substrate by high frequency sputtering method.
0A was deposited and a positive resist (AZ-1370Hoe
(manufactured by CHST) using a spinner and prebaked. Mask width 80grs on this resist layer
The ITO film was exposed to light using a striped mask with a mask pitch of 100 p and m, followed by development, washing with water to form a stripe pattern, and then etching the ITO film with a mixture of ferric chloride, hydrochloric acid and water.
次いでこの基板上にAIlをEB蒸着機により500A
で蒸着した。その後ガラス基板上にポジ型レジスト(A
Z−1370Hoechst社製)をスピンナーを用い
て1 gtx 塗布し、このレジスト層上にマスク巾2
0JLm、マスク部のピッチ100 JLllのストラ
イプ状マスクを用いて、ITO膜のストライプパターン
に5用履程度重なる様に露光した0次いで現像、水洗し
てストライプパターンを形成した後、リン酸、硝酸、酢
酸、水の混合液でAβをエツチングした。Next, Al was deposited on this substrate at 500A using an EB evaporator.
It was deposited with After that, a positive resist (A
Z-1370 (manufactured by Hoechst) was applied at 1 gtx using a spinner, and a mask width of 2
Using a striped mask of 0 JLm and a mask pitch of 100 JLll, the stripe pattern of the ITO film was exposed to light so as to overlap by about 5 cm. After developing and washing with water to form a stripe pattern, phosphoric acid, nitric acid, Aβ was etched with a mixture of acetic acid and water.
このようにして作製された2つの基板のそれぞれの表面
に、液晶配向膜として約500Aのポリビニルアルコー
ル層を形成し、ラビング処理を施した。次に2つの基板
を対向させ、間隙が約IJLI11となるようにビーズ
スペーサーで調節し、強誘電性液晶(p−η−オクチル
オキシ安息香酸−p’−(2−メチルブチルオキシ)フ
ェニルエステルとp−η−メニルオキシ安息香酸−p’
−(2−メチルブチルオキシ)フェニルエステルを主成
分とした液晶組成物〕を注入した。A polyvinyl alcohol layer of approximately 500 A was formed as a liquid crystal alignment film on the surface of each of the two substrates thus produced, and a rubbing treatment was performed. Next, the two substrates were placed facing each other, the gap was adjusted to approximately IJLI11 using bead spacers, and the ferroelectric liquid crystal (p-η-octyloxybenzoic acid-p'-(2-methylbutyloxy) phenyl ester) p-η-menyloxybenzoic acid-p'
-(2-methylbutyloxy)phenyl ester-based liquid crystal composition] was injected.
このようにして形成した液晶セルの両側に、偏光板をク
ロスニコルにして配設して、セルの駆動を行ったところ
、良好な表示特性を得ることができた。When polarizing plates were arranged in a crossed nicol configuration on both sides of the liquid crystal cell thus formed and the cell was driven, good display characteristics could be obtained.
実施例2
第2図に示すように、ITO膜の透明電極2をパターニ
ングした後に、電極間のスペース部に5i02の絶縁膜
6をフォトリソグラフィーで堆積させ、その後にAI!
のストライプパターンを形成した。それ以外は前記実施
例1と同様の構成である。このような構成とすることに
より、Ai)のストライプパターンの形成不良により生
じる隣接するITO膜とのショートを防止することがで
き、電極間のスペース部をほぼ完全に覆うことができる
。この実施例でも前記実施例1と同様に良好な表示特性
を得ることができた。Example 2 As shown in FIG. 2, after patterning the transparent electrode 2 of the ITO film, an insulating film 6 of 5i02 was deposited by photolithography in the space between the electrodes, and then AI!
A striped pattern was formed. Other than that, the configuration is the same as that of the first embodiment. With this configuration, it is possible to prevent short circuits with adjacent ITO films caused by poor formation of the stripe pattern of Ai), and it is possible to almost completely cover the space between the electrodes. In this example, as well as in Example 1, good display characteristics could be obtained.
上記実施例1.2において、透明電極間のスペース部を
AI!等の低抵抗金属膜で覆うことにより例えば、はぼ
A4サイズの表示面積に、通常のTV規格で動画表示を
行う場合、走査線の密度を4木/mtaとし、走査線の
長さを約300t+sとすると、走査線がITOのみの
場合、ITOのシート抵抗が20Ω/口で、走査線の抵
抗は約27 KΩとなる。In Example 1.2 above, the space between the transparent electrodes is AI! For example, when displaying a moving image according to normal TV standards on a display area of A4 size, the density of the scanning line should be 4/mta and the length of the scanning line should be approximately Assuming 300t+s, if the scanning line is made only of ITO, the sheet resistance of ITO is 20Ω/gate, and the resistance of the scanning line is about 27 KΩ.
一方、本発明によれば、金属としてAi)を使用し、巾
30g、m、厚さ0.1 p、mで一部ITOに重ねて
這わせると、この金属の配線抵抗は約4にΩとなる。こ
の結果、金属付きITOの走査線の配線抵抗は約3.5
にΩとなる。On the other hand, according to the present invention, if Ai) is used as the metal and is partially overlapped with ITO with a width of 30 g, m and a thickness of 0.1 p, m, the wiring resistance of this metal will be approximately 4 Ω. becomes. As a result, the wiring resistance of the metal-covered ITO scanning line is approximately 3.5
becomes Ω.
また、この走査線上に付設されている強誘電性液晶の電
気容量は約3.5 Xl0−9Fである。Further, the capacitance of the ferroelectric liquid crystal attached to this scanning line is approximately 3.5 Xl0-9F.
すなわち、このパネルの走査線に電圧信号を与えて液晶
を反転動作させる場合電圧信号の立上り時間は、走査線
の電気抵抗及び走査線上に付設された液晶の電気容量に
依存する。走査線がITOのみの場合には、この立上り
時間では約94JLSとなるが、本発明による金属付き
ITO線の場合にはで=14JLSとなる。That is, when a voltage signal is applied to the scanning line of this panel to invert the liquid crystal, the rise time of the voltage signal depends on the electrical resistance of the scanning line and the capacitance of the liquid crystal attached on the scanning line. If the scanning line is made of only ITO, this rise time will be approximately 94 JLS, but in the case of the ITO line with metal according to the present invention, it will be 14 JLS.
通常のTV規格で動画表示を行う場合、一本の走査線に
許される走査時間は、 83.5終Sであり、上述の様
に走査線がITOのみの場合には立上り時間が走査時間
より長くなるため、TV規格の動画表示は不可能である
。これに対し、本発明による金属付きITO線の場合に
は、走査時間は立上り時間の約5倍あり、充分子V規格
の動画表示が可能となる。When displaying moving images according to normal TV standards, the scanning time allowed for one scanning line is 83.5S, and as mentioned above, if the scanning line is only ITO, the rise time is longer than the scanning time. Because the length of the video is long, it is impossible to display video according to TV standards. On the other hand, in the case of the metal-attached ITO wire according to the present invention, the scanning time is approximately five times the rise time, making it possible to display a moving image in accordance with the full V standard.
[発明の効果]
以上説明したように、本発明によれば、セルの全面に渡
って電極スペース部の配向ムラをなくすことができ、全
面均一に鮮明な画像を得ることができる。また、低抵抗
の金属膜を遮光層とすることにより、表示面積を大きく
した場合でも高速表示が可能となった。[Effects of the Invention] As described above, according to the present invention, it is possible to eliminate alignment unevenness in the electrode space portion over the entire surface of the cell, and it is possible to obtain a uniform and clear image over the entire surface. Furthermore, by using a low-resistance metal film as a light-shielding layer, high-speed display became possible even when the display area was increased.
第1図は本発明の一実施例を示す基板の断面図、第2図
は本発明の他の実施例を示す基板の断面図である。
l二基板、2:透明電極、3:金属膜、4.5:絶縁膜
、5:配向膜。FIG. 1 is a sectional view of a substrate showing one embodiment of the invention, and FIG. 2 is a sectional view of a substrate showing another embodiment of the invention. 12 substrates, 2: transparent electrode, 3: metal film, 4.5: insulating film, 5: alignment film.
Claims (2)
間に、双安定性を有する液晶を挟持してなるセル構造の
液晶素子において、前記ストライプ状の透明電極に平行
に接触し、且つ前記ストライプ状の透明電極間のスペー
ス部を覆うように形成された低抵抗金属膜を設けたこと
を特徴とする液晶素子。(1) In a liquid crystal element having a cell structure in which bistable liquid crystal is sandwiched between two substrates on which striped transparent electrodes are formed, the liquid crystal element is in parallel contact with the striped transparent electrodes, and A liquid crystal element characterized in that a low resistance metal film is provided to cover the space between the striped transparent electrodes.
を特徴とする特許請求の範囲第1項に記載の液晶素子。(2) The liquid crystal element according to claim 1, wherein the liquid crystal having bistability is a ferroelectric liquid crystal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61155149A JP2520604B2 (en) | 1986-07-03 | 1986-07-03 | Liquid crystal element and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61155149A JP2520604B2 (en) | 1986-07-03 | 1986-07-03 | Liquid crystal element and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6311911A true JPS6311911A (en) | 1988-01-19 |
JP2520604B2 JP2520604B2 (en) | 1996-07-31 |
Family
ID=15599605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61155149A Expired - Fee Related JP2520604B2 (en) | 1986-07-03 | 1986-07-03 | Liquid crystal element and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2520604B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0249545U (en) * | 1988-09-28 | 1990-04-06 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS579977U (en) * | 1980-06-16 | 1982-01-19 | ||
JPS6125128A (en) * | 1984-07-14 | 1986-02-04 | Canon Inc | Liquid crystal element |
JPS61143725A (en) * | 1984-12-17 | 1986-07-01 | Citizen Watch Co Ltd | Colored liquid crystal panel |
-
1986
- 1986-07-03 JP JP61155149A patent/JP2520604B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS579977U (en) * | 1980-06-16 | 1982-01-19 | ||
JPS6125128A (en) * | 1984-07-14 | 1986-02-04 | Canon Inc | Liquid crystal element |
JPS61143725A (en) * | 1984-12-17 | 1986-07-01 | Citizen Watch Co Ltd | Colored liquid crystal panel |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0249545U (en) * | 1988-09-28 | 1990-04-06 |
Also Published As
Publication number | Publication date |
---|---|
JP2520604B2 (en) | 1996-07-31 |
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