JPS6311900U - - Google Patents
Info
- Publication number
- JPS6311900U JPS6311900U JP10500986U JP10500986U JPS6311900U JP S6311900 U JPS6311900 U JP S6311900U JP 10500986 U JP10500986 U JP 10500986U JP 10500986 U JP10500986 U JP 10500986U JP S6311900 U JPS6311900 U JP S6311900U
- Authority
- JP
- Japan
- Prior art keywords
- resist film
- resist
- solvent
- film stripping
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002904 solvent Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims 2
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10500986U JPS6311900U (de) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10500986U JPS6311900U (de) | 1986-07-10 | 1986-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6311900U true JPS6311900U (de) | 1988-01-26 |
Family
ID=30979033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10500986U Pending JPS6311900U (de) | 1986-07-10 | 1986-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6311900U (de) |
-
1986
- 1986-07-10 JP JP10500986U patent/JPS6311900U/ja active Pending
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