JPS63118987U - - Google Patents

Info

Publication number
JPS63118987U
JPS63118987U JP1015687U JP1015687U JPS63118987U JP S63118987 U JPS63118987 U JP S63118987U JP 1015687 U JP1015687 U JP 1015687U JP 1015687 U JP1015687 U JP 1015687U JP S63118987 U JPS63118987 U JP S63118987U
Authority
JP
Japan
Prior art keywords
fluorocarbon
workpiece
chain
cleaning machine
vapor region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1015687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425271Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987010156U priority Critical patent/JPH0425271Y2/ja
Publication of JPS63118987U publication Critical patent/JPS63118987U/ja
Application granted granted Critical
Publication of JPH0425271Y2 publication Critical patent/JPH0425271Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Chain Conveyers (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP1987010156U 1987-01-27 1987-01-27 Expired JPH0425271Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987010156U JPH0425271Y2 (en:Method) 1987-01-27 1987-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987010156U JPH0425271Y2 (en:Method) 1987-01-27 1987-01-27

Publications (2)

Publication Number Publication Date
JPS63118987U true JPS63118987U (en:Method) 1988-08-01
JPH0425271Y2 JPH0425271Y2 (en:Method) 1992-06-16

Family

ID=30796193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987010156U Expired JPH0425271Y2 (en:Method) 1987-01-27 1987-01-27

Country Status (1)

Country Link
JP (1) JPH0425271Y2 (en:Method)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558833A (en) * 1978-07-04 1980-01-22 Tokyo Shibaura Electric Co Method of washing

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558833A (en) * 1978-07-04 1980-01-22 Tokyo Shibaura Electric Co Method of washing

Also Published As

Publication number Publication date
JPH0425271Y2 (en:Method) 1992-06-16

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