JPS63118987U - - Google Patents

Info

Publication number
JPS63118987U
JPS63118987U JP1015687U JP1015687U JPS63118987U JP S63118987 U JPS63118987 U JP S63118987U JP 1015687 U JP1015687 U JP 1015687U JP 1015687 U JP1015687 U JP 1015687U JP S63118987 U JPS63118987 U JP S63118987U
Authority
JP
Japan
Prior art keywords
fluorocarbon
workpiece
chain
cleaning machine
vapor region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1015687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425271Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987010156U priority Critical patent/JPH0425271Y2/ja
Publication of JPS63118987U publication Critical patent/JPS63118987U/ja
Application granted granted Critical
Publication of JPH0425271Y2 publication Critical patent/JPH0425271Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Wiring (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Chain Conveyers (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP1987010156U 1987-01-27 1987-01-27 Expired JPH0425271Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987010156U JPH0425271Y2 (cs) 1987-01-27 1987-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987010156U JPH0425271Y2 (cs) 1987-01-27 1987-01-27

Publications (2)

Publication Number Publication Date
JPS63118987U true JPS63118987U (cs) 1988-08-01
JPH0425271Y2 JPH0425271Y2 (cs) 1992-06-16

Family

ID=30796193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987010156U Expired JPH0425271Y2 (cs) 1987-01-27 1987-01-27

Country Status (1)

Country Link
JP (1) JPH0425271Y2 (cs)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558833A (en) * 1978-07-04 1980-01-22 Tokyo Shibaura Electric Co Method of washing

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558833A (en) * 1978-07-04 1980-01-22 Tokyo Shibaura Electric Co Method of washing

Also Published As

Publication number Publication date
JPH0425271Y2 (cs) 1992-06-16

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