JPS63118504U - - Google Patents

Info

Publication number
JPS63118504U
JPS63118504U JP857087U JP857087U JPS63118504U JP S63118504 U JPS63118504 U JP S63118504U JP 857087 U JP857087 U JP 857087U JP 857087 U JP857087 U JP 857087U JP S63118504 U JPS63118504 U JP S63118504U
Authority
JP
Japan
Prior art keywords
reference plane
displacement sensor
measurement
sensor
optical displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP857087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP857087U priority Critical patent/JPS63118504U/ja
Publication of JPS63118504U publication Critical patent/JPS63118504U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP857087U 1987-01-26 1987-01-26 Pending JPS63118504U (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP857087U JPS63118504U (es) 1987-01-26 1987-01-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP857087U JPS63118504U (es) 1987-01-26 1987-01-26

Publications (1)

Publication Number Publication Date
JPS63118504U true JPS63118504U (es) 1988-08-01

Family

ID=30793070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP857087U Pending JPS63118504U (es) 1987-01-26 1987-01-26

Country Status (1)

Country Link
JP (1) JPS63118504U (es)

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