JPS63118231U - - Google Patents
Info
- Publication number
- JPS63118231U JPS63118231U JP840287U JP840287U JPS63118231U JP S63118231 U JPS63118231 U JP S63118231U JP 840287 U JP840287 U JP 840287U JP 840287 U JP840287 U JP 840287U JP S63118231 U JPS63118231 U JP S63118231U
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- etching
- portion formed
- stepped portion
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP840287U JPS63118231U (es) | 1987-01-22 | 1987-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP840287U JPS63118231U (es) | 1987-01-22 | 1987-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63118231U true JPS63118231U (es) | 1988-07-30 |
Family
ID=30792744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP840287U Pending JPS63118231U (es) | 1987-01-22 | 1987-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63118231U (es) |
-
1987
- 1987-01-22 JP JP840287U patent/JPS63118231U/ja active Pending