JPS63118040U - - Google Patents
Info
- Publication number
- JPS63118040U JPS63118040U JP1987007560U JP756087U JPS63118040U JP S63118040 U JPS63118040 U JP S63118040U JP 1987007560 U JP1987007560 U JP 1987007560U JP 756087 U JP756087 U JP 756087U JP S63118040 U JPS63118040 U JP S63118040U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- circuit pattern
- applying
- covering
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007560U JPS63118040U (en。) | 1987-01-23 | 1987-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007560U JPS63118040U (en。) | 1987-01-23 | 1987-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63118040U true JPS63118040U (en。) | 1988-07-30 |
Family
ID=30791127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987007560U Pending JPS63118040U (en。) | 1987-01-23 | 1987-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63118040U (en。) |
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1987
- 1987-01-23 JP JP1987007560U patent/JPS63118040U/ja active Pending