JPS63117357A - Magneto-optical disk and its manufacture - Google Patents
Magneto-optical disk and its manufactureInfo
- Publication number
- JPS63117357A JPS63117357A JP26485286A JP26485286A JPS63117357A JP S63117357 A JPS63117357 A JP S63117357A JP 26485286 A JP26485286 A JP 26485286A JP 26485286 A JP26485286 A JP 26485286A JP S63117357 A JPS63117357 A JP S63117357A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magneto
- oxide
- optical disk
- guide groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000002223 garnet Substances 0.000 claims abstract description 15
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 15
- 150000002910 rare earth metals Chemical class 0.000 claims abstract description 15
- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 claims abstract description 7
- 230000005415 magnetization Effects 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 14
- 230000000694 effects Effects 0.000 claims description 10
- 150000003839 salts Chemical class 0.000 claims description 5
- 229910000859 α-Fe Inorganic materials 0.000 claims description 5
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000000137 annealing Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 25
- 230000003287 optical effect Effects 0.000 abstract description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 238000002425 crystallisation Methods 0.000 abstract 1
- 230000008025 crystallization Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 64
- 239000000243 solution Substances 0.000 description 11
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 238000005979 thermal decomposition reaction Methods 0.000 description 4
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 3
- 229910052723 transition metal Inorganic materials 0.000 description 3
- 230000005374 Kerr effect Effects 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000012266 salt solution Substances 0.000 description 2
- FIPWRIJSWJWJAI-UHFFFAOYSA-N Butyl carbitol 6-propylpiperonyl ether Chemical compound C1=C(CCC)C(COCCOCCOCCCC)=CC2=C1OCO2 FIPWRIJSWJWJAI-UHFFFAOYSA-N 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
１生史１
本発明は、書換自在型の光磁気ディスクに関し、特にト
ラッキング制御のための渦巻状案内溝を有した基板から
なる光学式情報記録円盤に関する。DETAILED DESCRIPTION OF THE INVENTION 1. History 1. The present invention relates to a rewritable magneto-optical disk, and more particularly to an optical information recording disk comprising a substrate having a spiral guide groove for tracking control.
１且致ｌ
書換自在型の光磁気ディスクにおいては、光磁気記録媒
体として希土類−遷移金属アモルファス合金の薄膜を垂
直磁化膜に用いるものが開発されている。また、磁気光
学効果が大きく、アモルファス合金の欠点であった耐酸
化性に優れている光磁気記録媒体として、酸化物である
Ｂｉ置換ガーネットも注目されている。1. In a rewritable magneto-optical disk, a magneto-optical recording medium using a thin film of a rare earth-transition metal amorphous alloy as a perpendicular magnetization film has been developed. Bi-substituted garnet, which is an oxide, is also attracting attention as a magneto-optical recording medium that has a large magneto-optic effect and excellent oxidation resistance, which was a drawback of amorphous alloys.
第３図は、Ｂｉ置換希土類ガーネットを垂直磁化膜３と
した光磁気ディスク構造を示している。FIG. 3 shows a magneto-optical disk structure in which a perpendicularly magnetized film 3 is made of Bi-substituted rare earth garnet.
光磁気ディスクは、案内溝２がその主面上に形成された
円形ガラス平板すなわち基板１上に、垂直磁化膜３と反
射膜４とを順に積層させた構造を有している。案内溝は
光磁気ディスク完成後、レーザ光がその上を正確にトレ
ースするようにＩＩＩ ′ｍされるために設けられ、通
常、ディスクの半径方向のピッチは１．６μｍ程度であ
る。Ｂｉｔｔｙ換の希土類ガーネットの垂直磁化膜３は
、Ｂｉの置換量が多いほど磁気光学効果たとえばファラ
デー効果（ｏｆ）の値が大きくなる、さらに、垂直磁化
膜自体が透明であるので膜厚を厚くできる笠の利点があ
る。The magneto-optical disk has a structure in which a perpendicular magnetization film 3 and a reflective film 4 are sequentially laminated on a circular glass flat plate, that is, a substrate 1, on which a guide groove 2 is formed on its main surface. The guide grooves are provided so that the laser beam can accurately trace the guide grooves after the magneto-optical disk is completed, and the pitch in the radial direction of the disk is usually about 1.6 μm. In the perpendicular magnetization film 3 of rare earth garnet equivalent to Bitty, the greater the amount of Bi substitution, the larger the value of the magneto-optical effect, such as the Faraday effect (of).Furthermore, since the perpendicular magnetization film itself is transparent, the film thickness can be increased. There are advantages to having a hat.
かかる光磁気ディスクにおけるレーザ光による信号の読
取及びトラッキング制御は、次の如く行なわれる。第３
図に示す入射レーザ光５は透明な基板１を透過して、一
部のレーザ光は基板１と垂直磁化膜３との界面７で先ず
反射される。残りのレーザ光は、透明な垂直磁化膜３を
更に透過して垂直磁化膜３と反射膜４との界面８で反射
される。Signal reading and tracking control using a laser beam on such a magneto-optical disk is performed as follows. Third
The incident laser beam 5 shown in the figure is transmitted through the transparent substrate 1, and a part of the laser beam is first reflected at the interface 7 between the substrate 1 and the perpendicularly magnetized film 3. The remaining laser light further passes through the transparent perpendicular magnetization film 3 and is reflected at the interface 8 between the perpendicular magnetization film 3 and the reflective film 4.
このように、垂直磁化１！３を透過して垂直磁化膜３と
反射膜４との界面８で反射されたレーザ光は、カー効果
により偏光され、検光子を通して光検出装置（図示しな
い）によってレーザ光の強度信号が電気信号に変換され
記録信号が読取られる。また、基板１と垂直磁化膜３と
の界面７で反射されたレーザ光５１は、ディスク半径方
向の案内溝２及びその近傍の凹凸の位置関係により反射
レーザ光５１の半径方向の強度分布が変化するので、プ
ッシュプル法等を用いた光検出装置（図示しない）によ
って、電気信号に変換され、トラッキング誤差信号を得
ることができる。この場合、希土類−遷移金属アモルフ
ァス合金を垂直磁化膜とする光磁気ディスクでは基板と
垂直磁化膜との界面が金属光沢を有するのでレーザ光の
光示はあまり必要としないが、酸化物系垂直磁化膜によ
る光磁気ディスクでは膜自体が透明であるために案内溝
の検出においてレーザ光の光量を多くする必要がある。In this way, the laser beam that passes through the perpendicular magnetization 1!3 and is reflected at the interface 8 between the perpendicular magnetization film 3 and the reflective film 4 is polarized by the Kerr effect, passes through an analyzer, and is detected by a photodetector (not shown). The intensity signal of the laser beam is converted into an electrical signal and the recorded signal is read. In addition, the intensity distribution of the laser beam 51 reflected at the interface 7 between the substrate 1 and the perpendicularly magnetized film 3 changes in the radial direction depending on the positional relationship between the guide groove 2 in the disk radial direction and the unevenness in its vicinity. Therefore, it is converted into an electrical signal by a photodetector (not shown) using a push-pull method or the like, and a tracking error signal can be obtained. In this case, in a magneto-optical disk whose perpendicularly magnetized film is made of a rare earth-transition metal amorphous alloy, the interface between the substrate and the perpendicularly magnetized film has a metallic luster, so it does not require much laser light, but oxide-based perpendicularly magnetized In a magneto-optical disk using a film, since the film itself is transparent, it is necessary to increase the amount of laser light used to detect the guide groove.
また、このＢｉ置換希土類ガーネットの外にＢａフェラ
イト、ｃｏフェライト等も酸化物系垂直磁化膜として用
いられ始めている。これら酸化物系垂直磁化膜は、透明
で磁気光学効果が大きく、耐酸化性に優れており、その
形成はスパッタリング法のように大型装置を必要といな
い熱分解法によるので、光磁気ディスクの光磁気媒体膜
として好ましい。In addition to this Bi-substituted rare earth garnet, Ba ferrite, co ferrite, etc. are also beginning to be used as oxide-based perpendicular magnetization films. These oxide-based perpendicularly magnetized films are transparent, have a large magneto-optical effect, and have excellent oxidation resistance.They are formed by a thermal decomposition method that does not require large equipment like the sputtering method, so they can be Preferable as a magnetic media film.
かかる酸化物系垂直磁化膜を熱分解法によって形成する
従来の光磁気ディスクの製造方法を、第４図（ａ〜＋ｔ
ｏに示す概略断面図に示す。A conventional method for manufacturing a magneto-optical disk in which such an oxide-based perpendicularly magnetized film is formed by a thermal decomposition method is shown in FIG. 4 (a to +t).
It is shown in the schematic cross-sectional view shown in o.
第４図（ωにおいて、ガラス円盤すなわち基板１上に７
オトレジスト膜９をスピンナー等を用いてコーティング
してフォトレジスト膜９を成膜する。Figure 4 (at ω, 7
A photoresist film 9 is formed by coating the photoresist film 9 using a spinner or the like.
Ｂ１置換希土類ガーネットのような透明結晶酸化物を書
換え可能な光磁気ディスクの光磁気記録媒体として用い
る場合には、樹脂基板では耐えることのできない高温（
少くとも１２０℃以上）での熱処理が必要であるため、
基板として耐熱温度が高く、透明で光学的性能のすぐれ
たガラス等を用いなければならない。When using a transparent crystalline oxide such as B1-substituted rare earth garnet as a magneto-optical recording medium for a rewritable magneto-optical disk, it is difficult to withstand high temperatures (
Because heat treatment at a temperature of at least 120°C or higher is required,
The substrate must be made of glass or the like that has a high heat resistance, is transparent, and has excellent optical performance.
次に、第４図（ｂ）に示す如く、基板１をスピンドルモ
ータ等で一定速度に制御しながら回転させ、同時に対物
レンズ１１によってレーザ光１０をフォトレジスト膜９
上に焦光させ、フォトレジスト１１！１９を露光する。Next, as shown in FIG. 4(b), the substrate 1 is rotated while being controlled at a constant speed using a spindle motor or the like, and at the same time, the laser beam 10 is transmitted to the photoresist film 9 using the objective lens 11.
The photoresist 11!19 is exposed by focusing the light upward.
対物レンズ１−１を有した光ピツクアップ１２は基板１
の中心から半径上を一定速度に制御されつつ移動してお
り、そのためレーザビーム１０はフォトレジスト膜９を
スパイラル状に露光することになる。An optical pickup 12 having an objective lens 1-1 is connected to a substrate 1.
The laser beam 10 moves radially from the center at a constant speed while being controlled at a constant speed, so the laser beam 10 exposes the photoresist film 9 in a spiral manner.
次に、第４図（Ｃ）に示す如く、フォトレジスト膜９の
現像を行い、第４図（小に示す如く、これをマスクとし
て、基板１をエツチングする。Next, as shown in FIG. 4C, the photoresist film 9 is developed, and the substrate 1 is etched using this as a mask, as shown in FIG.
その後、第４図（ｅ）に示す如く、フォトレジスト膜を
洗浄、剥離させて案内溝２の形成された基板１を製造す
る。Thereafter, as shown in FIG. 4(e), the photoresist film is cleaned and peeled off to produce the substrate 1 on which the guide grooves 2 are formed.
次に、熱分解法を用いて基板１０案内溝２が形成された
面上に酸化物系垂直磁化膜を形成するために、予め、Ｂ
ｉ置換の希土類ガーネットを構成する金属イオンの塩を
主体とする硝酸溶液を調製する。Next, in order to form an oxide-based perpendicular magnetization film on the surface of the substrate 10 on which the guide groove 2 is formed using a thermal decomposition method, B
A nitric acid solution containing a salt of a metal ion constituting the i-substituted rare earth garnet is prepared.
その後、第４図（ｆ＋に示す如く、スピンコート法等に
よるスピンナー等を用いて硝酸溶液を基板１上に塗布し
、溶液膜３−を形成し、その後、熱処理炉１６中で加熱
処理することにより（第４図（９））、該溶液膜を熱分
解させて結晶化させＢｉ置換希土類ガーネツｔ” ［（
Ｂ ｉ、 Ｒ）ｓ Ｆｅｓ ０１２ （ＲはＧｄ、Ｄ
ｙ、Ｔｂ等の希土類金属の肉受なくとも１種類を示す）
］の酸化物系垂直磁化膜３を形成する方法である。尚、
Ｂｉ置換希土類ガーネットに代えてＣｏフェライト［Ｃ
０Ｆｅｚ ０４ ］の酸化物系垂直磁化１！Ｊ３でも同
様な方法にて形成できる。Thereafter, as shown in FIG. 4 (f+), a nitric acid solution is applied onto the substrate 1 using a spinner or the like using a spin coating method to form a solution film 3-, and then heat treatment is performed in a heat treatment furnace 16. (Fig. 4 (9)), the solution film is thermally decomposed and crystallized to form a Bi-substituted rare earth garnet.
B i, R)s Fes 012 (R is Gd, D
Indicates at least one type of rare earth metal such as y, Tb, etc.)
] is a method of forming an oxide-based perpendicular magnetization film 3. still,
Co ferrite [C
0Fez 04 ] oxide-based perpendicular magnetization 1! J3 can also be formed by a similar method.
次に、第４図（ｈ）に示す如く、スパッタリング等によ
り反射膜４を酸化物系垂直磁化膜３上に形成して光磁気
ディスクが得られる。Next, as shown in FIG. 4(h), a reflective film 4 is formed on the oxide-based perpendicularly magnetized film 3 by sputtering or the like to obtain a magneto-optical disk.
このように、従来の酸化物系垂直磁化膜による光磁気デ
ィスクでは、該垂直磁化膜が透明である故に、トラッキ
ング制御用の案内溝からの反射光量が希土類−遷移金属
アモルファス合金による光磁気ディスクに比べて多くと
れなかった。また、酸化物系垂直磁化膜による光磁気デ
ィスクの製造においては、特に、耐熱性を有するガラス
からなる基板に案内溝を形成する際に、基板を一枚一枚
、露光し、現像する工程が必要であり、大量に必要とさ
れる案内溝付基板としては、ガラスのエツチングに時間
がかかり、光磁気ディスクのＷＡ造歩留が低くなる欠点
があった。As described above, in a magneto-optical disk using a conventional oxide-based perpendicular magnetization film, since the perpendicular magnetization film is transparent, the amount of light reflected from the guide groove for tracking control is lower than that of a magneto-optical disk using a rare earth-transition metal amorphous alloy. I couldn't get much in comparison. In addition, in the production of magneto-optical disks using oxide-based perpendicular magnetization films, especially when forming guide grooves on substrates made of heat-resistant glass, there is a process of exposing and developing each substrate one by one. The substrate with guide grooves, which is necessary and required in large quantities, has the disadvantage that etching of the glass takes time and the WA manufacturing yield of magneto-optical disks is low.
ｌ且豊鳳Ｉ
従って、本発明は、上記の如き従来の光磁気ディスクの
欠点を解消せんがためになされたもので、光磁気ディス
クの案内溝の検出を容易にし、製造工程数を減少させて
製造に要する時間を短縮させ１ｑる光磁気ディスク及び
その製造方法を提供することを目的とする。Therefore, the present invention has been made to solve the above-mentioned drawbacks of the conventional magneto-optical disk, and it facilitates the detection of the guide groove of the magneto-optical disk and reduces the number of manufacturing steps. An object of the present invention is to provide a magneto-optical disk that can reduce the time required for manufacturing by 1q, and a method for manufacturing the same.
本発明の光磁気ディスクは、透明な円形平板と、その円
形平板上に成膜された磁気光学効果を有する酸化物系垂
直磁化膜と、該酸化物系垂直磁化膜上に成膜された反射
膜とからなり、酸化物系垂直磁化膜と反射膜との界面に
案内溝が形成されていることを特徴とする。The magneto-optical disk of the present invention includes a transparent circular flat plate, an oxide-based perpendicular magnetization film having a magneto-optic effect formed on the circular flat plate, and a reflective oxide-based perpendicular magnetization film formed on the oxide-based perpendicular magnetization film. A guide groove is formed at the interface between the oxide-based perpendicularly magnetized film and the reflective film.
また、本発明の光磁気ディスクの製造方法は、透明な円
形平板を形成する工程と、磁気光学効果を有する酸化物
系垂直磁化膜を組成する金属の塩を含む溶液を調製する
工程と、該調製溶液を円形平板の主面上にスピンコート
して金属塩の溶液膜を形成する工程と、該金属塩の溶液
膜上に案内溝型の転写面を圧着する工程と、案内溝型を
圧着した状態を保持して案内溝型と円形平板と溶液膜と
を加熱する工程と、金属塩の溶液膜を結晶化させる７二
−ルエ程とを含むことを特徴とする。Further, the method for manufacturing a magneto-optical disk of the present invention includes a step of forming a transparent circular flat plate, a step of preparing a solution containing a salt of a metal constituting an oxide-based perpendicularly magnetized film having a magneto-optic effect, A step of spin-coating the prepared solution onto the main surface of a circular flat plate to form a metal salt solution film, a step of pressing a guide groove type transfer surface onto the metal salt solution film, and a step of pressing the guide groove type. The present invention is characterized in that it includes a step of heating the guide groove mold, the circular flat plate, and the solution film while maintaining the same state, and a step of crystallizing the solution film of the metal salt.
支−豊一旦
以下、本発明の一実施例を添付図面に基づいて説明する
。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will now be described with reference to the accompanying drawings.
先ず、第１図（ωに示す如く、予め用意されたＢ；置換
希土類ガーネットを構成する金属の塩を主体とする溶液
をスピンナー等を用いて、円形のガラス平板である基板
１上に塗布し、溶液膜３−を形成する。First, as shown in FIG. 1 (ω), a pre-prepared solution mainly consisting of a salt of the metal constituting B: substituted rare earth garnet is applied onto the substrate 1, which is a circular glass flat plate, using a spinner or the like. , forming a solution film 3-.
その後、第１図（わ）に示す如く、予め案内溝がスパイ
ラル状に形成されたスタンパ−１５の転写面を溶液膜３
−に圧着させる。Thereafter, as shown in FIG.
- Crimp.
次に、第１図（Ｃ）に示す如く、スタンパ−１５と共に
基板１を熱処理炉１６中で加熱し、該溶液膜を熱分解さ
せ、固化させるのことによりスタンパ−１５上の案内溝
２が複写され、Ｂｉ置換希土類ガーネットを構成する金
属の酸化物膜３″ができる。かかる熱処理は、例えば希
土類ガーネットでは１００〜４００℃、数１０秒〜数分
必要である。Next, as shown in FIG. 1C, the substrate 1 and the stamper 15 are heated in a heat treatment furnace 16 to thermally decompose and solidify the solution film, thereby forming the guide grooves 2 on the stamper 15. A metal oxide film 3'' constituting the Bi-substituted rare earth garnet is formed by copying. For example, in the case of rare earth garnet, such heat treatment is required at 100 to 400° C. for several tens of seconds to several minutes.
その後、第１図（小に示す如く、スタンパ−１５を基板
１から剥離させ、もう−度、結晶化のため、より高温の
熱処理を行ない酸化物系垂直磁化膜３を形成する。スタ
ンパ−１５の材料としては、高温における硬度、寸法精
度を維持するために、Ｎｉ又はＮｉＰなどが使用される
。Thereafter, as shown in FIG. As the material, Ni or NiP is used in order to maintain hardness and dimensional accuracy at high temperatures.
次に、第１図（ｅ）に示す如く、スパッタリング等によ
り反射！１１４を酸化物系垂直磁化膜３上に形成して本
実施例の光磁気ディスクが得られる。Next, as shown in FIG. 1(e), it is reflected by sputtering, etc. 114 is formed on the oxide-based perpendicular magnetization film 3 to obtain the magneto-optical disk of this embodiment.
第２図に示すように本実施例の光磁気ディスクにおいて
は、レーザ光による信号の読取及びトラッキング制御は
、次の如く行なわれる。入射レーザ光５は透明な基板１
を透過して、一部のレーザ光は基板１と酸化物系垂直磁
化８３との界面７で先ず反射される。残りのレーザ光は
、透明な垂直磁化膜３を更に透過して垂直磁化１１３と
反射膜４との界面８で反射される。As shown in FIG. 2, in the magneto-optical disk of this embodiment, signal reading and tracking control using laser light are performed as follows. Incident laser beam 5 is transmitted to transparent substrate 1
A part of the laser beam is first reflected at the interface 7 between the substrate 1 and the oxide-based perpendicular magnetization 83. The remaining laser light further passes through the transparent perpendicular magnetization film 3 and is reflected at the interface 8 between the perpendicular magnetization 113 and the reflective film 4.
垂直磁化膜３を透過して垂直磁化１！Ｊ ３と反射膜４
との界面８で反射されたレーザ光５２は、カー効果によ
り偏光され、検光子を通して光検出装置によってレーザ
光の強度信号が電気信号に変換され記録信号が読取られ
る。また、ディスク半径方向の案内溝及びその近傍の凹
凸の位置関係により反射レーザ光５２の半径方向の強度
分布が変化するので、光検出装置によって電気信号に変
換され、トラッキング誤差信号を得ることができる。Perpendicular magnetization 1 after passing through the perpendicular magnetization film 3! J 3 and reflective film 4
The laser beam 52 reflected at the interface 8 is polarized by the Kerr effect, passes through an analyzer, and a photodetector converts the intensity signal of the laser beam into an electrical signal and reads the recorded signal. In addition, since the radial intensity distribution of the reflected laser beam 52 changes depending on the positional relationship between the guide groove in the disk radial direction and the unevenness in the vicinity thereof, it is converted into an electrical signal by the photodetector, and a tracking error signal can be obtained. .
従って、本実施例の光磁気ディスクによれば、反射光の
うち案内溝の形成された垂直磁化膜３と反射膜４との界
面８で反射された従来よりも強い反射レーザ光５２によ
って、トラッキング誤差信号を得ることができる。Therefore, according to the magneto-optical disk of this embodiment, the tracking is performed by the reflected laser beam 52, which is stronger than the conventional one and is reflected at the interface 8 between the perpendicular magnetization film 3 and the reflective film 4 in which the guide groove is formed. An error signal can be obtained.
なお、上記実施例ではスタンパ−を剥離した後、アニー
ルしてＢｉ置換希土類ガーネットを結晶化させる製造方
法を示したが、スタンパ−を剥離する前に、スタンパ−
と共に熱分解のための熱処理と同時に結晶化させても、
実施例と同様な光磁気ディスクが得られる。In the above example, a manufacturing method was shown in which the Bi-substituted rare earth garnet was crystallized by annealing after peeling off the stamper.
Even if it is crystallized at the same time as the heat treatment for pyrolysis,
A magneto-optical disk similar to that of the example is obtained.
ｌユ立羞」
以上詳述した如く、本発明の光磁気ディスクによれば、
透明な酸化物系垂直磁化膜と反射膜との界面に案内溝が
形成されて、トラッキング制御のための反射レーザ光の
光量が従来の光磁気ディスクに比べて多くなるゆえに、
光磁気ディスクの案内溝によるトラッキングが容易にな
る。As detailed above, according to the magneto-optical disk of the present invention,
Because guide grooves are formed at the interface between the transparent oxide-based perpendicular magnetization film and the reflective film, the amount of reflected laser light for tracking control is greater than that of conventional magneto-optical disks.
Tracking by the guide groove of the magneto-optical disk becomes easier.
また、本発明の光磁気ディスクのＥｌ製造方法よれば、
Ｂｉ置換希土類ガーネット垂直磁化膜を熱分解法を用い
て成膜する際にスタンパ−を圧着したまま熱処理により
熱分解することにより、酸化物系垂直磁化膜の成膜と同
時に案内溝を直接、形成できるため、ガラス基板を一枚
一枚、露光する必要がなく、−枚のスタンパ−から酸化
物系垂直磁化膜を担持した案内溝付基板の複製を容易に
作成することができ、かつ製造工程数を少なくできる。Further, according to the method for producing El of a magneto-optical disk of the present invention,
When depositing a Bi-substituted rare earth garnet perpendicularly magnetized film using a thermal decomposition method, the stamper is thermally decomposed with the stamper still in contact with the film, and guide grooves are directly formed at the same time as the oxide-based perpendicularly magnetized film is deposited. Therefore, it is not necessary to expose each glass substrate one by one, and it is possible to easily create a replica of a substrate with guide grooves carrying an oxide-based perpendicular magnetization film from a single stamper, and the manufacturing process can be simplified. The number can be reduced.
第１図は本発明の一実施例による光磁気ディスクの製造
方法を示ｔｉ略断面図、第２図はこの発明の一実施例に
よる光磁気ディスクの構造を示す概略断面図、第３図は
従来の光磁気ディスクの構造を示す概略断面図、第４図
は従来の光磁気ディスクの製造方法を示す概略断面図で
ある。
主要部分の符号の説明
１・・・・・・基板
２・・・・・・案内溝
３・・・・・・酸化物系垂直磁化膜
４ ・・・・・・反９４月美FIG. 1 is a schematic cross-sectional view showing a method for manufacturing a magneto-optical disk according to an embodiment of the present invention, FIG. 2 is a schematic cross-sectional view showing the structure of a magneto-optical disk according to an embodiment of the present invention, and FIG. FIG. 4 is a schematic cross-sectional view showing the structure of a conventional magneto-optical disk, and FIG. 4 is a schematic cross-sectional view showing a method of manufacturing a conventional magneto-optical disk. Explanation of symbols of main parts 1...Substrate 2...Guide groove 3...Oxide-based perpendicular magnetization film 4...Anti-94 moon beauty
Claims (4)
磁気光学効果を有する酸化物系垂直磁化膜と、前記酸化
物系垂直磁化膜上に成膜された反射膜とからなり、前記
酸化物系垂直磁化膜と反射膜との界面に案内溝が形成さ
れていることを特徴とする光磁気ディスク。(1) consisting of a transparent circular flat plate, an oxide-based perpendicularly magnetized film having a magneto-optical effect formed on the circular flat plate, and a reflective film formed on the oxide-based perpendicularly magnetized film, A magneto-optical disk characterized in that a guide groove is formed at the interface between the oxide-based perpendicular magnetization film and the reflective film.
、Ｂｉ置換希土類ガーネット又はＣｏフェライトである
ことを特徴とする特許請求の範囲第１項記載の光磁気デ
ィスク。(2) The magneto-optical disk according to claim 1, wherein the oxide-based perpendicularly magnetized film having the magneto-optic effect is Bi-substituted rare earth garnet or Co ferrite.
を有する酸化物系垂直磁化膜を組成する金属の塩を含む
溶液を調製する工程と、前記溶液を前記円形平板の主面
上にスピンコートして溶液膜を形成する工程と、前記溶
液膜上に案内溝型の転写面を圧着する工程と、前記案内
溝型を圧着した状態を保持して前記案内溝型と前記円形
平板と前記溶液膜とを加熱する工程と、前記溶液膜を結
晶化させるアニール工程とを含むことを特徴とする光磁
気ディスクの製造方法。(3) a step of forming a transparent circular flat plate; a step of preparing a solution containing a metal salt constituting an oxide-based perpendicularly magnetized film having a magneto-optic effect; and applying the solution on the main surface of the circular flat plate. a step of forming a solution film by spin coating; a step of press-bonding a transfer surface of the guide groove type onto the solution film; and a step of holding the guide groove type in a pressed state and connecting the guide groove type and the circular flat plate. A method for manufacturing a magneto-optical disk, comprising the steps of heating the solution film and annealing the solution film.
、Ｂｉ置換希土類ガーネット又はＣｏフェライトである
ことを特徴とする特許請求の範囲第３項記載の光磁気デ
ィスクの製造方法。(4) The method for manufacturing a magneto-optical disk according to claim 3, wherein the oxide-based perpendicularly magnetized film having the magneto-optic effect is Bi-substituted rare earth garnet or Co ferrite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26485286A JPS63117357A (en) | 1986-11-05 | 1986-11-05 | Magneto-optical disk and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26485286A JPS63117357A (en) | 1986-11-05 | 1986-11-05 | Magneto-optical disk and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63117357A true JPS63117357A (en) | 1988-05-21 |
Family
ID=17409111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26485286A Pending JPS63117357A (en) | 1986-11-05 | 1986-11-05 | Magneto-optical disk and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63117357A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0389297A1 (en) * | 1989-03-24 | 1990-09-26 | Kabushiki Kaisha Toshiba | A spin glass magnetic body, a magnetic recording medium and a magnetic recording apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013339A (en) * | 1983-07-04 | 1985-01-23 | Ricoh Co Ltd | Photomagnetic memory medium |
| JPS6043235A (en) * | 1983-08-18 | 1985-03-07 | Matsushita Electric Ind Co Ltd | Tracking signal detector |
-
1986
- 1986-11-05 JP JP26485286A patent/JPS63117357A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013339A (en) * | 1983-07-04 | 1985-01-23 | Ricoh Co Ltd | Photomagnetic memory medium |
| JPS6043235A (en) * | 1983-08-18 | 1985-03-07 | Matsushita Electric Ind Co Ltd | Tracking signal detector |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0389297A1 (en) * | 1989-03-24 | 1990-09-26 | Kabushiki Kaisha Toshiba | A spin glass magnetic body, a magnetic recording medium and a magnetic recording apparatus |
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