JPS6311636U - - Google Patents

Info

Publication number
JPS6311636U
JPS6311636U JP1986105841U JP10584186U JPS6311636U JP S6311636 U JPS6311636 U JP S6311636U JP 1986105841 U JP1986105841 U JP 1986105841U JP 10584186 U JP10584186 U JP 10584186U JP S6311636 U JPS6311636 U JP S6311636U
Authority
JP
Japan
Prior art keywords
mask case
utility
model registration
transporting hand
transported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986105841U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986105841U priority Critical patent/JPS6311636U/ja
Publication of JPS6311636U publication Critical patent/JPS6311636U/ja
Pending legal-status Critical Current

Links

JP1986105841U 1986-07-08 1986-07-08 Pending JPS6311636U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986105841U JPS6311636U (fr) 1986-07-08 1986-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986105841U JPS6311636U (fr) 1986-07-08 1986-07-08

Publications (1)

Publication Number Publication Date
JPS6311636U true JPS6311636U (fr) 1988-01-26

Family

ID=30980650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986105841U Pending JPS6311636U (fr) 1986-07-08 1986-07-08

Country Status (1)

Country Link
JP (1) JPS6311636U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999012074A1 (fr) * 1997-08-29 1999-03-11 Nikon Corporation Boitier de photomasque, dispositif et procede d'acheminement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999012074A1 (fr) * 1997-08-29 1999-03-11 Nikon Corporation Boitier de photomasque, dispositif et procede d'acheminement
US6499935B1 (en) 1997-08-29 2002-12-31 Nikon Corporation Photomask case, transporting apparatus, and transporting method

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