JPH0313741U - - Google Patents
Info
- Publication number
- JPH0313741U JPH0313741U JP7526989U JP7526989U JPH0313741U JP H0313741 U JPH0313741 U JP H0313741U JP 7526989 U JP7526989 U JP 7526989U JP 7526989 U JP7526989 U JP 7526989U JP H0313741 U JPH0313741 U JP H0313741U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer
- inspection
- utility
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000007689 inspection Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7526989U JPH0313741U (fr) | 1989-06-27 | 1989-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7526989U JPH0313741U (fr) | 1989-06-27 | 1989-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0313741U true JPH0313741U (fr) | 1991-02-12 |
Family
ID=31615702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7526989U Pending JPH0313741U (fr) | 1989-06-27 | 1989-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0313741U (fr) |
-
1989
- 1989-06-27 JP JP7526989U patent/JPH0313741U/ja active Pending