JPS63116342U - - Google Patents

Info

Publication number

JPS63116342U

JPS63116342U JP855887U JP855887U JPS63116342U JP S63116342 U JPS63116342 U JP S63116342U JP 855887 U JP855887 U JP 855887U JP 855887 U JP855887 U JP 855887U JP S63116342 U JPS63116342 U JP S63116342U

Authority

JP

Japan

Prior art keywords

heating resistor

buffering agent

resistor element

thermal

sio

Prior art date

1987-01-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 230000001681 protective effect Effects 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000006172 buffering agent Substances 0.000 claims 2
• 238000010438 heat treatment Methods 0.000 claims 2
• 229910004298 SiO 2 Inorganic materials 0.000 claims 1
• 239000000203 mixture Substances 0.000 claims 1
• 239000000919 ceramic Substances 0.000 description 1