JPS63116261U - - Google Patents
Info
- Publication number
- JPS63116261U JPS63116261U JP1987007185U JP718587U JPS63116261U JP S63116261 U JPS63116261 U JP S63116261U JP 1987007185 U JP1987007185 U JP 1987007185U JP 718587 U JP718587 U JP 718587U JP S63116261 U JPS63116261 U JP S63116261U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- workpiece
- polishing
- main shaft
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 7
- 239000000356 contaminant Substances 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007185U JPS63116261U (fr) | 1987-01-21 | 1987-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007185U JPS63116261U (fr) | 1987-01-21 | 1987-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63116261U true JPS63116261U (fr) | 1988-07-27 |
Family
ID=30790407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987007185U Pending JPS63116261U (fr) | 1987-01-21 | 1987-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63116261U (fr) |
-
1987
- 1987-01-21 JP JP1987007185U patent/JPS63116261U/ja active Pending
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