JPS63116195U - - Google Patents
Info
- Publication number
- JPS63116195U JPS63116195U JP1987008374U JP837487U JPS63116195U JP S63116195 U JPS63116195 U JP S63116195U JP 1987008374 U JP1987008374 U JP 1987008374U JP 837487 U JP837487 U JP 837487U JP S63116195 U JPS63116195 U JP S63116195U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- reflecting mirror
- reflecting
- degrees different
- reflects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
Description
第１図は本考案の一実施例に係る光走査型加工
機の構成を示す図、第２図はレーザビーム走査時
の反射鏡移動を説明する図、第３図は従来例を示
す図、第４図はレーザビームの光路長とレーザビ
ーム径との関係を示す図である。
１１…レーザ発振器、２１〜２３…反射鏡、２
４…レンズ、２５…被加工物、ＬＢ…レーザビー
ム。
FIG. 1 is a diagram showing the configuration of an optical scanning processing machine according to an embodiment of the present invention, FIG. 2 is a diagram illustrating the movement of a reflecting mirror during laser beam scanning, and FIG. 3 is a diagram showing a conventional example. FIG. 4 is a diagram showing the relationship between the optical path length of the laser beam and the laser beam diameter. 11...Laser oscillator, 21-23...Reflector, 2
4... Lens, 25... Workpiece, LB... Laser beam.
Claims (1)
、上記レーザ発振器から第１の方向に発振出力さ
れるレーザビームを上記第１の方向とは９０度異
なる方向に反射させる第１反射鏡と、この第１反
射鏡で反射された上記レーザビームを上記第１の
方向とは１８０度異なる第２の方向に反射させる
第２反射鏡と、この第２反射鏡で反射された上記
レーザビームを上記第２の方向とは９０度異なる
方向に反射させて被加工物に直接または間接に照
射する第３反射鏡とを具備し、１方向のレーザビ
ーム走査に際し、上記第３反射鏡を上記第１およ
び第２反射鏡の移動方向と同一方向へ上記第１お
よび第２反射鏡の２倍の移動速度で移動するよう
にしたことを特徴とする光走査型加工機。 In an optical scanning processing machine equipped with a laser oscillator, a first reflecting mirror that reflects a laser beam oscillated and output from the laser oscillator in a first direction in a direction 90 degrees different from the first direction; a second reflecting mirror that reflects the laser beam reflected by the first reflecting mirror in a second direction that is 180 degrees different from the first direction; and a third reflecting mirror that directly or indirectly irradiates the workpiece by reflecting the laser beam in a direction 90 degrees different from the direction of the laser beam. An optical scanning processing machine characterized in that it moves in the same direction as the moving direction of the two reflecting mirrors at twice the moving speed of the first and second reflecting mirrors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987008374U JPS63116195U (en) | 1987-01-23 | 1987-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987008374U JPS63116195U (en) | 1987-01-23 | 1987-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63116195U true JPS63116195U (en) | 1988-07-27 |
Family
ID=30792691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987008374U Pending JPS63116195U (en) | 1987-01-23 | 1987-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63116195U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05154681A (en) * | 1991-09-26 | 1993-06-22 | Fanuc Ltd | Optical path length fixing device in laser beam machine |
-
1987
- 1987-01-23 JP JP1987008374U patent/JPS63116195U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05154681A (en) * | 1991-09-26 | 1993-06-22 | Fanuc Ltd | Optical path length fixing device in laser beam machine |