JPS6311562U - - Google Patents
Info
- Publication number
- JPS6311562U JPS6311562U JP10493486U JP10493486U JPS6311562U JP S6311562 U JPS6311562 U JP S6311562U JP 10493486 U JP10493486 U JP 10493486U JP 10493486 U JP10493486 U JP 10493486U JP S6311562 U JPS6311562 U JP S6311562U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- vapor phase
- phase growth
- output
- pressure vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10493486U JPS6311562U (ko) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10493486U JPS6311562U (ko) | 1986-07-10 | 1986-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6311562U true JPS6311562U (ko) | 1988-01-26 |
Family
ID=30978888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10493486U Pending JPS6311562U (ko) | 1986-07-10 | 1986-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6311562U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03229874A (ja) * | 1990-02-05 | 1991-10-11 | Matsushita Electric Ind Co Ltd | 膜堆積装置 |
-
1986
- 1986-07-10 JP JP10493486U patent/JPS6311562U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03229874A (ja) * | 1990-02-05 | 1991-10-11 | Matsushita Electric Ind Co Ltd | 膜堆積装置 |
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