JPS62136567U - - Google Patents
Info
- Publication number
- JPS62136567U JPS62136567U JP2178886U JP2178886U JPS62136567U JP S62136567 U JPS62136567 U JP S62136567U JP 2178886 U JP2178886 U JP 2178886U JP 2178886 U JP2178886 U JP 2178886U JP S62136567 U JPS62136567 U JP S62136567U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- automatic valve
- vacuum chamber
- vacuum
- pressure controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000013459 approach Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Feedback Control In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2178886U JPH0512281Y2 (ko) | 1986-02-17 | 1986-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2178886U JPH0512281Y2 (ko) | 1986-02-17 | 1986-02-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62136567U true JPS62136567U (ko) | 1987-08-28 |
| JPH0512281Y2 JPH0512281Y2 (ko) | 1993-03-29 |
Family
ID=30818553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2178886U Expired - Lifetime JPH0512281Y2 (ko) | 1986-02-17 | 1986-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0512281Y2 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013225660A (ja) * | 2012-03-21 | 2013-10-31 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法、基板処理方法、基板処理装置およびプログラム |
-
1986
- 1986-02-17 JP JP2178886U patent/JPH0512281Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013225660A (ja) * | 2012-03-21 | 2013-10-31 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法、基板処理方法、基板処理装置およびプログラム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0512281Y2 (ko) | 1993-03-29 |