JPS63115601U - - Google Patents

Info

Publication number
JPS63115601U
JPS63115601U JP763087U JP763087U JPS63115601U JP S63115601 U JPS63115601 U JP S63115601U JP 763087 U JP763087 U JP 763087U JP 763087 U JP763087 U JP 763087U JP S63115601 U JPS63115601 U JP S63115601U
Authority
JP
Japan
Prior art keywords
piston
pressure chamber
low
vacuum pump
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP763087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP763087U priority Critical patent/JPS63115601U/ja
Publication of JPS63115601U publication Critical patent/JPS63115601U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Fluid-Pressure Circuits (AREA)
JP763087U 1987-01-23 1987-01-23 Pending JPS63115601U (US06168776-20010102-C00028.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP763087U JPS63115601U (US06168776-20010102-C00028.png) 1987-01-23 1987-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP763087U JPS63115601U (US06168776-20010102-C00028.png) 1987-01-23 1987-01-23

Publications (1)

Publication Number Publication Date
JPS63115601U true JPS63115601U (US06168776-20010102-C00028.png) 1988-07-26

Family

ID=30791262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP763087U Pending JPS63115601U (US06168776-20010102-C00028.png) 1987-01-23 1987-01-23

Country Status (1)

Country Link
JP (1) JPS63115601U (US06168776-20010102-C00028.png)

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