JPS63115225U - - Google Patents

Info

Publication number
JPS63115225U
JPS63115225U JP766687U JP766687U JPS63115225U JP S63115225 U JPS63115225 U JP S63115225U JP 766687 U JP766687 U JP 766687U JP 766687 U JP766687 U JP 766687U JP S63115225 U JPS63115225 U JP S63115225U
Authority
JP
Japan
Prior art keywords
foreign matter
semiconductor case
removing foreign
semiconductor
vacuum source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP766687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0729642Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP766687U priority Critical patent/JPH0729642Y2/ja
Publication of JPS63115225U publication Critical patent/JPS63115225U/ja
Application granted granted Critical
Publication of JPH0729642Y2 publication Critical patent/JPH0729642Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP766687U 1987-01-21 1987-01-21 半導体ケ−ス内異物除去装置 Expired - Lifetime JPH0729642Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP766687U JPH0729642Y2 (ja) 1987-01-21 1987-01-21 半導体ケ−ス内異物除去装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP766687U JPH0729642Y2 (ja) 1987-01-21 1987-01-21 半導体ケ−ス内異物除去装置

Publications (2)

Publication Number Publication Date
JPS63115225U true JPS63115225U (enrdf_load_stackoverflow) 1988-07-25
JPH0729642Y2 JPH0729642Y2 (ja) 1995-07-05

Family

ID=30791332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP766687U Expired - Lifetime JPH0729642Y2 (ja) 1987-01-21 1987-01-21 半導体ケ−ス内異物除去装置

Country Status (1)

Country Link
JP (1) JPH0729642Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0729642Y2 (ja) 1995-07-05

Similar Documents

Publication Publication Date Title
JPH043910U (enrdf_load_stackoverflow)
JPS63115225U (enrdf_load_stackoverflow)
JPS63148804U (enrdf_load_stackoverflow)
JPH0313259U (enrdf_load_stackoverflow)
JPH02102154U (enrdf_load_stackoverflow)
JPS6351660U (enrdf_load_stackoverflow)
JPH0350786U (enrdf_load_stackoverflow)
JPS62127248U (enrdf_load_stackoverflow)
JPH0328064U (enrdf_load_stackoverflow)
JPH0294760U (enrdf_load_stackoverflow)
JPH02121016U (enrdf_load_stackoverflow)
JPH02116295U (enrdf_load_stackoverflow)
JPS63176839U (enrdf_load_stackoverflow)
JPH03813U (enrdf_load_stackoverflow)
JPS6353679U (enrdf_load_stackoverflow)
JPH02117321U (enrdf_load_stackoverflow)
JPH0344583U (enrdf_load_stackoverflow)
JPH01108265U (enrdf_load_stackoverflow)
JPH0349935U (enrdf_load_stackoverflow)
JPH0214819U (enrdf_load_stackoverflow)
JPH01155440U (enrdf_load_stackoverflow)
JPH0332015U (enrdf_load_stackoverflow)
JPS6362401U (enrdf_load_stackoverflow)
JPS63161296U (enrdf_load_stackoverflow)
JPS62140917U (enrdf_load_stackoverflow)