JPS63115225U - - Google Patents
Info
- Publication number
- JPS63115225U JPS63115225U JP766687U JP766687U JPS63115225U JP S63115225 U JPS63115225 U JP S63115225U JP 766687 U JP766687 U JP 766687U JP 766687 U JP766687 U JP 766687U JP S63115225 U JPS63115225 U JP S63115225U
- Authority
- JP
- Japan
- Prior art keywords
- foreign matter
- semiconductor case
- removing foreign
- semiconductor
- vacuum source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
Landscapes
- Cleaning In General (AREA)
Description
第１図は本考案の実施例１の縦断面図、第２図
は他の実施例の縦断面図である。
１……半導体ケース、２……製品セツト部、３
……真空源、４……バネ、５……ピストン、６…
…半導体ケース、７……製品セツト部、８……真
空源、９……バネ、１０……ピストン、１１……
軸、１２……バネ。
FIG. 1 is a longitudinal sectional view of Embodiment 1 of the present invention, and FIG. 2 is a longitudinal sectional view of another embodiment. 1... Semiconductor case, 2... Product setting section, 3
...Vacuum source, 4...Spring, 5...Piston, 6...
...Semiconductor case, 7...Product setting section, 8...Vacuum source, 9...Spring, 10...Piston, 11...
Axis, 12...spring.
Claims (1)
源で半導体ケースの固定と、異物除去のための衝
撃と、異物吸引を同時に行うことを特徴とする半
導体ケース内異物除去装置。 A device for removing foreign matter in a semiconductor case, characterized in that when removing foreign matter inside a semiconductor case, the same vacuum source simultaneously performs fixing of the semiconductor case, impact for foreign matter removal, and foreign matter suction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP766687U JPH0729642Y2 (en) | 1987-01-21 | 1987-01-21 | Foreign matter removal device in semiconductor case |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP766687U JPH0729642Y2 (en) | 1987-01-21 | 1987-01-21 | Foreign matter removal device in semiconductor case |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63115225U true JPS63115225U (en) | 1988-07-25 |
| JPH0729642Y2 JPH0729642Y2 (en) | 1995-07-05 |
Family
ID=30791332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP766687U Expired - Lifetime JPH0729642Y2 (en) | 1987-01-21 | 1987-01-21 | Foreign matter removal device in semiconductor case |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729642Y2 (en) |
-
1987
- 1987-01-21 JP JP766687U patent/JPH0729642Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729642Y2 (en) | 1995-07-05 |