JPS63115225U - - Google Patents
Info
- Publication number
- JPS63115225U JPS63115225U JP766687U JP766687U JPS63115225U JP S63115225 U JPS63115225 U JP S63115225U JP 766687 U JP766687 U JP 766687U JP 766687 U JP766687 U JP 766687U JP S63115225 U JPS63115225 U JP S63115225U
- Authority
- JP
- Japan
- Prior art keywords
- foreign matter
- semiconductor case
- removing foreign
- semiconductor
- vacuum source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP766687U JPH0729642Y2 (ja) | 1987-01-21 | 1987-01-21 | 半導体ケ−ス内異物除去装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP766687U JPH0729642Y2 (ja) | 1987-01-21 | 1987-01-21 | 半導体ケ−ス内異物除去装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63115225U true JPS63115225U (OSRAM) | 1988-07-25 |
| JPH0729642Y2 JPH0729642Y2 (ja) | 1995-07-05 |
Family
ID=30791332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP766687U Expired - Lifetime JPH0729642Y2 (ja) | 1987-01-21 | 1987-01-21 | 半導体ケ−ス内異物除去装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729642Y2 (OSRAM) |
-
1987
- 1987-01-21 JP JP766687U patent/JPH0729642Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729642Y2 (ja) | 1995-07-05 |