JPS63115223U - - Google Patents

Info

Publication number
JPS63115223U
JPS63115223U JP716387U JP716387U JPS63115223U JP S63115223 U JPS63115223 U JP S63115223U JP 716387 U JP716387 U JP 716387U JP 716387 U JP716387 U JP 716387U JP S63115223 U JPS63115223 U JP S63115223U
Authority
JP
Japan
Prior art keywords
voltage
conductor
insulator
power source
adsorption device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP716387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0528773Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987007163U priority Critical patent/JPH0528773Y2/ja
Publication of JPS63115223U publication Critical patent/JPS63115223U/ja
Application granted granted Critical
Publication of JPH0528773Y2 publication Critical patent/JPH0528773Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Automatic Assembly (AREA)
  • Feeding Of Workpieces (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1987007163U 1987-01-20 1987-01-20 Expired - Lifetime JPH0528773Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987007163U JPH0528773Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-20 1987-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987007163U JPH0528773Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-20 1987-01-20

Publications (2)

Publication Number Publication Date
JPS63115223U true JPS63115223U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-25
JPH0528773Y2 JPH0528773Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-23

Family

ID=30790362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987007163U Expired - Lifetime JPH0528773Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-20 1987-01-20

Country Status (1)

Country Link
JP (1) JPH0528773Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4786693B2 (ja) 2008-09-30 2011-10-05 三菱重工業株式会社 ウェハ接合装置およびウェハ接合方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244332A (ja) * 1985-08-23 1987-02-26 Canon Inc 静電吸着装置
JPS62153034A (ja) * 1985-12-25 1987-07-08 Taihei Kagaku Seihin Kk 静電保持装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244332A (ja) * 1985-08-23 1987-02-26 Canon Inc 静電吸着装置
JPS62153034A (ja) * 1985-12-25 1987-07-08 Taihei Kagaku Seihin Kk 静電保持装置

Also Published As

Publication number Publication date
JPH0528773Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-23

Similar Documents

Publication Publication Date Title
JPS63115223U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0336721U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0422048U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0224290U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6411542U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0326334U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH01143295U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0343338U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6194846U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63188843U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6393100U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH02132225U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6289011U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0414489U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS641739U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0336658U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6214724U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62125916U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0266921U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63126047U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62158791U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61126794U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0413050U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH01143035U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61159882U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)