JPS63115222U - - Google Patents

Info

Publication number
JPS63115222U
JPS63115222U JP734987U JP734987U JPS63115222U JP S63115222 U JPS63115222 U JP S63115222U JP 734987 U JP734987 U JP 734987U JP 734987 U JP734987 U JP 734987U JP S63115222 U JPS63115222 U JP S63115222U
Authority
JP
Japan
Prior art keywords
pad
width
cutting
measuring pad
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP734987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0514513Y2 (US20080293856A1-20081127-C00150.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP734987U priority Critical patent/JPH0514513Y2/ja
Publication of JPS63115222U publication Critical patent/JPS63115222U/ja
Application granted granted Critical
Publication of JPH0514513Y2 publication Critical patent/JPH0514513Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP734987U 1987-01-21 1987-01-21 Expired - Lifetime JPH0514513Y2 (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP734987U JPH0514513Y2 (US20080293856A1-20081127-C00150.png) 1987-01-21 1987-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP734987U JPH0514513Y2 (US20080293856A1-20081127-C00150.png) 1987-01-21 1987-01-21

Publications (2)

Publication Number Publication Date
JPS63115222U true JPS63115222U (US20080293856A1-20081127-C00150.png) 1988-07-25
JPH0514513Y2 JPH0514513Y2 (US20080293856A1-20081127-C00150.png) 1993-04-19

Family

ID=30790717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP734987U Expired - Lifetime JPH0514513Y2 (US20080293856A1-20081127-C00150.png) 1987-01-21 1987-01-21

Country Status (1)

Country Link
JP (1) JPH0514513Y2 (US20080293856A1-20081127-C00150.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01186652A (ja) * 1988-01-14 1989-07-26 Seiko Epson Corp 半導体装置
KR100960890B1 (ko) 2007-12-27 2010-06-04 주식회사 동부하이텍 금속 배선의 검사를 위한 pcm 테스트 패턴

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01186652A (ja) * 1988-01-14 1989-07-26 Seiko Epson Corp 半導体装置
KR100960890B1 (ko) 2007-12-27 2010-06-04 주식회사 동부하이텍 금속 배선의 검사를 위한 pcm 테스트 패턴

Also Published As

Publication number Publication date
JPH0514513Y2 (US20080293856A1-20081127-C00150.png) 1993-04-19

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