JPS63115215U - - Google Patents
Info
- Publication number
- JPS63115215U JPS63115215U JP693787U JP693787U JPS63115215U JP S63115215 U JPS63115215 U JP S63115215U JP 693787 U JP693787 U JP 693787U JP 693787 U JP693787 U JP 693787U JP S63115215 U JPS63115215 U JP S63115215U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- wafer
- cage body
- conductor
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 8
- 239000004065 semiconductor Substances 0.000 claims 4
- 238000001035 drying Methods 0.000 claims 3
- 239000004020 conductor Substances 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP693787U JPS63115215U (enExample) | 1987-01-22 | 1987-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP693787U JPS63115215U (enExample) | 1987-01-22 | 1987-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115215U true JPS63115215U (enExample) | 1988-07-25 |
Family
ID=30789922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP693787U Pending JPS63115215U (enExample) | 1987-01-22 | 1987-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115215U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0228926A (ja) * | 1988-07-19 | 1990-01-31 | Matsushita Electron Corp | 半導体装置の製造装置 |
-
1987
- 1987-01-22 JP JP693787U patent/JPS63115215U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0228926A (ja) * | 1988-07-19 | 1990-01-31 | Matsushita Electron Corp | 半導体装置の製造装置 |