JPS63114253A - Linear image sensor - Google Patents

Linear image sensor

Info

Publication number
JPS63114253A
JPS63114253A JP61260400A JP26040086A JPS63114253A JP S63114253 A JPS63114253 A JP S63114253A JP 61260400 A JP61260400 A JP 61260400A JP 26040086 A JP26040086 A JP 26040086A JP S63114253 A JPS63114253 A JP S63114253A
Authority
JP
Japan
Prior art keywords
picture elements
black reference
charge
light sensitive
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61260400A
Other languages
Japanese (ja)
Inventor
Achio Shiyudou
首藤 阿千雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP61260400A priority Critical patent/JPS63114253A/en
Publication of JPS63114253A publication Critical patent/JPS63114253A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/148Charge coupled imagers
    • H01L27/14825Linear CCD imagers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Facsimile Heads (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

PURPOSE:To remove noises perfectly and to improve the quality of an image, by providing black reference picture elements at gap parts between light sensitive picture elements, sequentially reading the signals generated in the light sensitive picture elements and the signals generated in the black reference picture elements, and correcting charge at dark time. CONSTITUTION:Light sensitive picture elements 21 are arranged at a specified pitch. Black reference picture elements 22 are arranged at gap parts between the light sensitive picture elements as dummy picture elements. A reading register 24 is arranged in parallel with the line of the light sensitive picture elements 21 and the black reference picture elements 22. An output circuit 25 is provided at one end of the register 24. A shift gate 23 is provided between the light sensitive picture elements 21 and the black reference picture element 23 in order to transfer the charge generated in each picture element. The charge at dark time is read out of the black reference picture elements 22 provided at the gap parts between the light sensitive picture elements at any time. The signal charge is corrected by using the charge at the dark time. Thus the correction with the charge at the dark time can be performed without the effect of temperature distribution and the like in a linear image sensor, and the excellent picture elements can be obtained.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明はリニアイメージセンサにかかり、特に画素の長
さと画素間のピッチが異なるリニアイメージセンサに関
する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a linear image sensor, and particularly relates to a linear image sensor in which pixel lengths and pitches between pixels are different.

(従来の技術) リニアイメージセンサの中には画素の長さと画素間のピ
ッチが同じになっていないものも多く、例えばこれらが
2:1の関係になっているものを第3図に示す。同図に
よれば、入射光に応じて信号電荷を発生および蓄積する
感光画素2が所定のピッチで配設され、この感光画素列
の延長上には暗時電荷を発生および蓄積する黒基準画素
1が形成されている。これらの画素から発生した電荷を
取出すために読出しレジスタ4が感光画素列と平行に設
けられており、その先端部には信号電荷を所定の形式で
出力する出力回路5が設けられている。黒基準画素1お
よび感光画素2と読出しレジスタ4との間にはシフトゲ
ート3が設けられている。このシフトゲート3は所定の
タイミングで開くことにより感光画素に蓄積された信号
電荷を一斉に読出しレジスタの方へ移送するものである
(Prior Art) There are many linear image sensors in which the length of a pixel and the pitch between pixels are not the same. For example, FIG. 3 shows a sensor in which these have a 2:1 relationship. According to the figure, photosensitive pixels 2 that generate and accumulate signal charges according to incident light are arranged at a predetermined pitch, and black reference pixels 2 that generate and accumulate dark charges are arranged on the extension of this photosensitive pixel row. 1 is formed. A readout register 4 is provided in parallel with the photosensitive pixel array to take out the charges generated from these pixels, and an output circuit 5 is provided at the tip thereof to output signal charges in a predetermined format. A shift gate 3 is provided between the black reference pixel 1 and the photosensitive pixel 2 and the readout register 4. The shift gate 3 is opened at a predetermined timing to transfer the signal charges accumulated in the photosensitive pixels all at once to the readout register.

また、読出しレジスタ4は例えばCCDで構成され、3
相、4相等のクロック信号によりレジスタ内容を出力部
の方へ順次転送する。
Further, the read register 4 is composed of, for example, a CCD, and
The contents of the registers are sequentially transferred to the output section using clock signals such as phase and four-phase.

出力回路5では感光画素2で得られた信号電荷から黒基
準画素1で得られた暗時電荷を差引いて補正をするとと
もに所定のレベルおよびタイミングで出力するものであ
る。この様な補正を行うのは感光画素が光の入射がなく
ても発生する雑音成分である暗時電荷(暗電流)を必ず
有しているため、これを除去して画質の向上を図る必要
があるためである。
The output circuit 5 corrects the signal charge obtained by the black reference pixel 1 by subtracting the dark charge obtained by the black reference pixel 1 from the signal charge obtained by the photosensitive pixel 2, and outputs the signal charge at a predetermined level and timing. This type of correction is performed because photosensitive pixels always have a dark charge (dark current), which is a noise component that occurs even when no light is incident, so it is necessary to remove this to improve image quality. This is because there is.

この様な構成のリニアイメージセンサでは黒基準画素は
1チツプ内で1個だけ設けられているため、リニアイメ
ージセンサ全体で暗時電荷のばらつきを生じるような場
合には補正が十分に行われないことになる。例えば、セ
ンサ内での発熱および放熱の相違から熱分布は不規則と
なり、高温の箇所はど暗時電荷は多くなる。また、製造
プロセスの状態や駆動回路の出力変動によっても暗時電
荷量は変動する。
In a linear image sensor with such a configuration, only one black reference pixel is provided in one chip, so if there is variation in dark charge across the entire linear image sensor, correction will not be performed sufficiently. It turns out. For example, heat distribution becomes irregular due to differences in heat generation and heat dissipation within the sensor, and dark charges increase in high temperature areas. Further, the amount of dark charge varies depending on the state of the manufacturing process and the output variation of the drive circuit.

そして暗時電荷の補正が十分に行われないときは画質が
劣化することになる。
If the dark charge is not sufficiently corrected, the image quality will deteriorate.

(発明が解決しようとする問題点) この様に従来のリニアイメージセンサにおいてはセンサ
中の温度分布等による暗時電荷のばらつきを十分補正で
きず良好な画質を得ることが困難であった。
(Problems to be Solved by the Invention) As described above, in the conventional linear image sensor, it has been difficult to obtain good image quality because variations in dark charge due to temperature distribution in the sensor cannot be sufficiently corrected.

本発明はこの様な問題点を解決しようとするもので、良
好な画質を得ることができるものである。
The present invention is an attempt to solve such problems and is capable of obtaining good image quality.

〔発明の構成〕[Structure of the invention]

(問題点を解決するための手段) 本発明によれば、所定ピッチで列状に配設された、入射
光に応じて信号電荷を発生および蓄積する感光画素と、
感光画素間の空隙部に設けられ、入射光の有無にかかわ
らず暗時電荷を発生および蓄積する黒基■画素と、感光
画素および黒基準画素で発生した電荷を出力部へ転送す
る読出しレジスタと、この読出しレジスタにより感光画
素における信号電荷と黒基準画素における暗時電荷を順
次読出すようにしている。
(Means for Solving the Problems) According to the present invention, photosensitive pixels that generate and accumulate signal charges according to incident light are arranged in a row at a predetermined pitch;
A black base pixel, which is provided in the gap between the photosensitive pixels and generates and accumulates dark charge regardless of the presence or absence of incident light, and a readout register that transfers the charge generated in the photosensitive pixel and the black reference pixel to the output section. This reading register sequentially reads out the signal charge in the photosensitive pixel and the dark charge in the black reference pixel.

(作 用) 本発明にかかるリニアイメージセンサでは感光画素間の
空隙部に設けられた黒基準画素から暗時電荷を随時読出
すようにし、これを用いて信号電荷の補正をするように
している。このため、リニアイメージセンサ内での温度
分布等の影響を受けず、より完全な暗時電荷補正が可能
となり、良好な画質を得ることができる。
(Function) In the linear image sensor according to the present invention, the dark charge is read out at any time from the black reference pixel provided in the gap between the photosensitive pixels, and this is used to correct the signal charge. . Therefore, it is possible to perform more complete dark charge correction without being affected by temperature distribution, etc. within the linear image sensor, and it is possible to obtain good image quality.

(実施例) 以ド、図面を参照して本発明の一実施例を詳細に説明す
る。
(Embodiment) Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

第1図は本発明の一実施例を示す平面図であって、所定
のピッチで感光画素1が配列されており、この感光画素
間の空隙部には黒基準画素22をいわゆるダミー画素と
して配設している。これら感光画素21および黒基準画
素22の列と平行に読出しレジスタ24が配設されてお
り、その一端部には出力回路25が設けられている。感
光画素21および黒基準画素22と読出しレジスタ23
の間には各画素で発生した電荷を移送するためのシフト
ゲート23が設けられている。この実施例では感光画素
21と黒基準画素22の長さはほぼ等しくなっているが
、画素長さ/画素ピッチの任意の比率を有するリニアイ
メージセンサにそのまま適用してその比率にしてもよい
。なお、この様に感光画素間に黒基準画素を挟むと感光
画素間の距離が多少長くなることがあるが、ユーザのセ
ンサの使用があまり高精度を要求していなければまった
く問題はない。
FIG. 1 is a plan view showing an embodiment of the present invention, in which photosensitive pixels 1 are arranged at a predetermined pitch, and black reference pixels 22 are arranged as so-called dummy pixels in the gaps between the photosensitive pixels. It is set up. A readout register 24 is arranged parallel to the columns of the photosensitive pixels 21 and the black reference pixels 22, and an output circuit 25 is provided at one end thereof. Photosensitive pixel 21, black reference pixel 22, and readout register 23
A shift gate 23 is provided between them for transferring charges generated in each pixel. In this embodiment, the lengths of the photosensitive pixel 21 and the black reference pixel 22 are approximately equal, but this ratio may be applied as is to a linear image sensor having an arbitrary ratio of pixel length/pixel pitch. Note that when a black reference pixel is sandwiched between photosensitive pixels in this way, the distance between the photosensitive pixels may become somewhat longer, but this is not a problem at all if the user's use of the sensor does not require very high precision.

第2図は第1図のリニアイメージセンサを用いであるパ
ターンを読出した際の出力電位を示すグラフである。同
図によれば、黒基準画素21に対応して暗時電荷による
信号31□、31゜、・・・と感光画素22による信号
32.32□、・・・とが交互に現れている。なお、感
光画素22から得られた信号32にはハツチングで示す
暗時電荷に相当する信号が重畳されているが、例えばあ
る位置での信号32.から隣接する信号341、を差引
くようにすれば暗時電荷の補正がほぼ完全に行なえるこ
とになる。この様な信号間の減算は出力回路25の中で
行われるが、外部の回路で行うようにしてもよい。
FIG. 2 is a graph showing the output potential when a certain pattern is read using the linear image sensor of FIG. According to the figure, corresponding to the black reference pixel 21, signals 31□, 31°, . . . due to dark charges and signals 32, 32□, . Note that a signal corresponding to the dark charge shown by hatching is superimposed on the signal 32 obtained from the photosensitive pixel 22, and for example, the signal 32. By subtracting the adjacent signal 341 from the signal 341, the dark charge can be almost completely corrected. Although such subtraction between signals is performed in the output circuit 25, it may also be performed in an external circuit.

なお、以上の実施例においては、感光画素間の全ての空
隙部に黒基準画素を設ける様にしているが、要求される
分解能および読取り精度によっては数個の感光画素に1
個の割合で黒基準画素を設けるようにしてもよい。
In the above embodiment, a black reference pixel is provided in all the gaps between photosensitive pixels, but depending on the required resolution and reading accuracy, one black reference pixel may be provided in several photosensitive pixels.
Black reference pixels may be provided at a ratio of .

〔発明の効果〕〔Effect of the invention〕

以上の実施例に基づいて詳細に説明したように、本発明
によれば感光画素間の空隙部に黒基準画素を設け、感光
画素で発生した信号と黒基準画素で発生した信号とを順
次読出して暗時電荷を補正するようにしているのでノイ
ズ除去を完全に行うことができ画質の向」二を図ること
ができる。
As described in detail based on the above embodiments, according to the present invention, a black reference pixel is provided in the gap between the photosensitive pixels, and a signal generated by the photosensitive pixel and a signal generated by the black reference pixel are sequentially read out. Since the dark charge is corrected using the image sensor, noise can be completely removed and the image quality can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明にかかるリニアイメージセンサの一実施
例を示す平面図、第2図は第1図のセンサを用いてパタ
ーン読出しを行った際、の信号波形を示すグラフ、第3
図は従来のリニアイメージセンサの例を示す平面図であ
る。 1.21・・・黒基準画素、2.22・・・感光画素、
3.23・・・シフトゲート、4,24・・・読出しレ
ジスタ、5.25・・・出力回路。
FIG. 1 is a plan view showing an embodiment of a linear image sensor according to the present invention, FIG. 2 is a graph showing a signal waveform when reading out a pattern using the sensor shown in FIG. 1, and FIG.
The figure is a plan view showing an example of a conventional linear image sensor. 1.21...Black reference pixel, 2.22...Photosensitive pixel,
3.23...Shift gate, 4,24...Read register, 5.25...Output circuit.

Claims (1)

【特許請求の範囲】 1、所定ピッチで列状に配設され、入射光に応じて信号
電荷を発生および蓄積する感光画素と、前記感光画素間
の空隙部に設けられ、入射光の有無にかかわらず暗時電
荷を発生および蓄積する黒基準画素と、 前記感光画素および黒基準画素で発生した電荷を出力部
へ転送する読出しレジスタと、 この読出しレジスタにより前記感光画素における信号電
荷と前記黒基準画素における暗時電荷を順次読出して暗
時電荷の補正を行うようにしたリニアイメージセンサ。 2、出力部が検出された暗時電荷の変動に基づいて信号
電荷の補正を行うようにしてなる特許請求の範囲第1項
記載のリニアイメージセンサ。 3、感光画素間の各空隙部にそれぞれ黒基準画素が設け
られた特許請求の範囲第1項記載のリニアイメージセン
サ。
[Claims] 1. Photosensitive pixels arranged in a row at a predetermined pitch and generating and accumulating signal charges according to incident light; and photosensitive pixels arranged in a gap between the photosensitive pixels and depending on the presence or absence of incident light a black reference pixel that generates and accumulates dark charge regardless of the time; a readout register that transfers the charges generated in the photosensitive pixel and the black reference pixel to an output section; and a readout register that transfers the signal charge in the photosensitive pixel and the black reference A linear image sensor that corrects dark charges by sequentially reading out dark charges in pixels. 2. The linear image sensor according to claim 1, wherein the output section corrects the signal charge based on the fluctuation of the detected dark charge. 3. The linear image sensor according to claim 1, wherein a black reference pixel is provided in each gap between the photosensitive pixels.
JP61260400A 1986-10-31 1986-10-31 Linear image sensor Pending JPS63114253A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61260400A JPS63114253A (en) 1986-10-31 1986-10-31 Linear image sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61260400A JPS63114253A (en) 1986-10-31 1986-10-31 Linear image sensor

Publications (1)

Publication Number Publication Date
JPS63114253A true JPS63114253A (en) 1988-05-19

Family

ID=17347386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61260400A Pending JPS63114253A (en) 1986-10-31 1986-10-31 Linear image sensor

Country Status (1)

Country Link
JP (1) JPS63114253A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1330117A2 (en) * 2002-01-16 2003-07-23 Fuji Photo Film Co., Ltd. Image reading method and image recording and reading device
JP2019158664A (en) * 2018-03-14 2019-09-19 株式会社 システムスクエア Inspection device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1330117A2 (en) * 2002-01-16 2003-07-23 Fuji Photo Film Co., Ltd. Image reading method and image recording and reading device
EP1330117A3 (en) * 2002-01-16 2004-01-21 Fuji Photo Film Co., Ltd. Image reading method and image recording and reading device
JP2019158664A (en) * 2018-03-14 2019-09-19 株式会社 システムスクエア Inspection device

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