JPS63114049U - - Google Patents
Info
- Publication number
- JPS63114049U JPS63114049U JP610687U JP610687U JPS63114049U JP S63114049 U JPS63114049 U JP S63114049U JP 610687 U JP610687 U JP 610687U JP 610687 U JP610687 U JP 610687U JP S63114049 U JPS63114049 U JP S63114049U
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- electrode film
- semiconductor
- piezoresistors
- resistors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP610687U JPS63114049U (ru) | 1987-01-20 | 1987-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP610687U JPS63114049U (ru) | 1987-01-20 | 1987-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63114049U true JPS63114049U (ru) | 1988-07-22 |
Family
ID=30788309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP610687U Pending JPS63114049U (ru) | 1987-01-20 | 1987-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63114049U (ru) |
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1987
- 1987-01-20 JP JP610687U patent/JPS63114049U/ja active Pending