JPS63114048U - - Google Patents

Info

Publication number
JPS63114048U
JPS63114048U JP500587U JP500587U JPS63114048U JP S63114048 U JPS63114048 U JP S63114048U JP 500587 U JP500587 U JP 500587U JP 500587 U JP500587 U JP 500587U JP S63114048 U JPS63114048 U JP S63114048U
Authority
JP
Japan
Prior art keywords
diaphragm
piezoresistors
semiconductor
pressure sensor
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP500587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP500587U priority Critical patent/JPS63114048U/ja
Publication of JPS63114048U publication Critical patent/JPS63114048U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP500587U 1987-01-16 1987-01-16 Pending JPS63114048U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP500587U JPS63114048U (ko) 1987-01-16 1987-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP500587U JPS63114048U (ko) 1987-01-16 1987-01-16

Publications (1)

Publication Number Publication Date
JPS63114048U true JPS63114048U (ko) 1988-07-22

Family

ID=30786186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP500587U Pending JPS63114048U (ko) 1987-01-16 1987-01-16

Country Status (1)

Country Link
JP (1) JPS63114048U (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425256U (ko) * 1990-06-25 1992-02-28
JP2011220927A (ja) * 2010-04-13 2011-11-04 Yamatake Corp 圧力センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425256U (ko) * 1990-06-25 1992-02-28
JP2011220927A (ja) * 2010-04-13 2011-11-04 Yamatake Corp 圧力センサ

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