JPS63114020U - - Google Patents
Info
- Publication number
- JPS63114020U JPS63114020U JP610187U JP610187U JPS63114020U JP S63114020 U JPS63114020 U JP S63114020U JP 610187 U JP610187 U JP 610187U JP 610187 U JP610187 U JP 610187U JP S63114020 U JPS63114020 U JP S63114020U
- Authority
- JP
- Japan
- Prior art keywords
- liquid nitrogen
- molecular beam
- electron impact
- evaporation source
- nitrogen shroud
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP610187U JPS63114020U (nl) | 1987-01-20 | 1987-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP610187U JPS63114020U (nl) | 1987-01-20 | 1987-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63114020U true JPS63114020U (nl) | 1988-07-22 |
Family
ID=30788299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP610187U Pending JPS63114020U (nl) | 1987-01-20 | 1987-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63114020U (nl) |
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1987
- 1987-01-20 JP JP610187U patent/JPS63114020U/ja active Pending