JPH0425858U - - Google Patents

Info

Publication number

JPH0425858U

JPH0425858U JP6428190U JP6428190U JPH0425858U JP H0425858 U JPH0425858 U JP H0425858U JP 6428190 U JP6428190 U JP 6428190U JP 6428190 U JP6428190 U JP 6428190U JP H0425858 U JPH0425858 U JP H0425858U

Authority

JP

Japan

Prior art keywords

electron beam

evaporation

beam gun

rotating jig

prevention plate

Prior art date

1990-06-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008020 evaporation Effects 0.000 claims description 7
• 238000001704 evaporation Methods 0.000 claims description 7
• 238000010894 electron beam technology Methods 0.000 claims description 6
• 238000005566 electron beam evaporation Methods 0.000 claims description 4
• 230000002265 prevention Effects 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 2
• 239000000463 material Substances 0.000 claims 2
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000007740 vapor deposition Methods 0.000 claims 1
• 230000008021 deposition Effects 0.000 description 1