JPS63113412A - マスク照明光学系 - Google Patents

マスク照明光学系

Info

Publication number
JPS63113412A
JPS63113412A JP62131848A JP13184887A JPS63113412A JP S63113412 A JPS63113412 A JP S63113412A JP 62131848 A JP62131848 A JP 62131848A JP 13184887 A JP13184887 A JP 13184887A JP S63113412 A JPS63113412 A JP S63113412A
Authority
JP
Japan
Prior art keywords
lens
light
collimation
light source
light flux
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62131848A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248090B2 (enrdf_load_stackoverflow
Inventor
Yoshiaki Mimura
三村　義昭
Kazue Yoshida
吉田　和衛
Kunio Konno
今野　邦男
Nobuya Shinoyama
篠山　伸彌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Telegraph and Telephone Corp
Original Assignee
Nikon Corp
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Telegraph and Telephone Corp filed Critical Nikon Corp
Priority to JP62131848A priority Critical patent/JPS63113412A/ja
Publication of JPS63113412A publication Critical patent/JPS63113412A/ja
Publication of JPH0248090B2 publication Critical patent/JPH0248090B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP62131848A 1987-05-29 1987-05-29 マスク照明光学系 Granted JPS63113412A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62131848A JPS63113412A (ja) 1987-05-29 1987-05-29 マスク照明光学系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62131848A JPS63113412A (ja) 1987-05-29 1987-05-29 マスク照明光学系

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP15874079A Division JPS5681813A (en) 1979-12-08 1979-12-08 Mask lighting optical system

Publications (2)

Publication Number Publication Date
JPS63113412A true JPS63113412A (ja) 1988-05-18
JPH0248090B2 JPH0248090B2 (enrdf_load_stackoverflow) 1990-10-24

Family

ID=15067524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62131848A Granted JPS63113412A (ja) 1987-05-29 1987-05-29 マスク照明光学系

Country Status (1)

Country Link
JP (1) JPS63113412A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4998191A (en) * 1988-10-28 1991-03-05 Asahi Kogaku Kogyo Kabushiki Kaisha Illuminating optical device
US5121160A (en) * 1989-03-09 1992-06-09 Canon Kabushiki Kaisha Exposure method and apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6885433B2 (en) 1990-11-15 2005-04-26 Nikon Corporation Projection exposure apparatus and method
US6897942B2 (en) 1990-11-15 2005-05-24 Nikon Corporation Projection exposure apparatus and method
US6967710B2 (en) 1990-11-15 2005-11-22 Nikon Corporation Projection exposure apparatus and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4998191A (en) * 1988-10-28 1991-03-05 Asahi Kogaku Kogyo Kabushiki Kaisha Illuminating optical device
US5121160A (en) * 1989-03-09 1992-06-09 Canon Kabushiki Kaisha Exposure method and apparatus

Also Published As

Publication number Publication date
JPH0248090B2 (enrdf_load_stackoverflow) 1990-10-24

Similar Documents

Publication Publication Date Title
US4918583A (en) Illuminating optical device
US4497013A (en) Illuminating apparatus
JPS633288B2 (enrdf_load_stackoverflow)
TW396397B (en) Illumination system and exposure apparatus having the same
US5610763A (en) Illuminating optical apparatus
JPH0378607B2 (enrdf_load_stackoverflow)
JPH06214318A (ja) 反射型ホモジナイザーおよび反射型照明光学装置
JPH043528B2 (enrdf_load_stackoverflow)
WO1999008144A1 (en) Optical device for modifying the angular and spatial distribution of illuminating energy
JPH0412039B2 (enrdf_load_stackoverflow)
JPH032284B2 (enrdf_load_stackoverflow)
JP3640391B1 (ja) 照明光学装置
JPH05211003A (ja) 直径の異なる光導体を使用した投射照明システム
CA2447285A1 (en) Projection type display apparatus
KR20000070180A (ko) 투영광원
JP2002198309A (ja) 熱的な負荷の少ない照明系
JPS62115718A (ja) 照明光学系
US5218660A (en) Illumination device
JPS58160914A (ja) ミラ−集光型照明光学系
JPS63113412A (ja) マスク照明光学系
JPH0572628A (ja) 光源装置
PL336469A1 (en) Optical imaging system and graphical user's interface
JP2002031850A (ja) 照明装置およびこれを用いた投射型表示装置
JPH0774086A (ja) 投影露光装置
US6022123A (en) Light source device