JPS63112336U - - Google Patents
Info
- Publication number
- JPS63112336U JPS63112336U JP242687U JP242687U JPS63112336U JP S63112336 U JPS63112336 U JP S63112336U JP 242687 U JP242687 U JP 242687U JP 242687 U JP242687 U JP 242687U JP S63112336 U JPS63112336 U JP S63112336U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support plate
- semiconductor wafer
- wafer support
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP242687U JPS63112336U (enExample) | 1987-01-13 | 1987-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP242687U JPS63112336U (enExample) | 1987-01-13 | 1987-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112336U true JPS63112336U (enExample) | 1988-07-19 |
Family
ID=30781256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP242687U Pending JPS63112336U (enExample) | 1987-01-13 | 1987-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112336U (enExample) |
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1987
- 1987-01-13 JP JP242687U patent/JPS63112336U/ja active Pending