JPS63112336U - - Google Patents

Info

Publication number
JPS63112336U
JPS63112336U JP242687U JP242687U JPS63112336U JP S63112336 U JPS63112336 U JP S63112336U JP 242687 U JP242687 U JP 242687U JP 242687 U JP242687 U JP 242687U JP S63112336 U JPS63112336 U JP S63112336U
Authority
JP
Japan
Prior art keywords
wafer
support plate
semiconductor wafer
wafer support
protrusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP242687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP242687U priority Critical patent/JPS63112336U/ja
Publication of JPS63112336U publication Critical patent/JPS63112336U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP242687U 1987-01-13 1987-01-13 Pending JPS63112336U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP242687U JPS63112336U (enrdf_load_stackoverflow) 1987-01-13 1987-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP242687U JPS63112336U (enrdf_load_stackoverflow) 1987-01-13 1987-01-13

Publications (1)

Publication Number Publication Date
JPS63112336U true JPS63112336U (enrdf_load_stackoverflow) 1988-07-19

Family

ID=30781256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP242687U Pending JPS63112336U (enrdf_load_stackoverflow) 1987-01-13 1987-01-13

Country Status (1)

Country Link
JP (1) JPS63112336U (enrdf_load_stackoverflow)

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