JPS63111606U - - Google Patents

Info

Publication number
JPS63111606U
JPS63111606U JP328387U JP328387U JPS63111606U JP S63111606 U JPS63111606 U JP S63111606U JP 328387 U JP328387 U JP 328387U JP 328387 U JP328387 U JP 328387U JP S63111606 U JPS63111606 U JP S63111606U
Authority
JP
Japan
Prior art keywords
wavefront
wavefronts
measured
shearing interferometer
fringe scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP328387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP328387U priority Critical patent/JPS63111606U/ja
Publication of JPS63111606U publication Critical patent/JPS63111606U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP328387U 1987-01-13 1987-01-13 Pending JPS63111606U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP328387U JPS63111606U (enrdf_load_stackoverflow) 1987-01-13 1987-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP328387U JPS63111606U (enrdf_load_stackoverflow) 1987-01-13 1987-01-13

Publications (1)

Publication Number Publication Date
JPS63111606U true JPS63111606U (enrdf_load_stackoverflow) 1988-07-18

Family

ID=30782902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP328387U Pending JPS63111606U (enrdf_load_stackoverflow) 1987-01-13 1987-01-13

Country Status (1)

Country Link
JP (1) JPS63111606U (enrdf_load_stackoverflow)

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